7/30/2010	12:13:07 AM	H2 valve closed
7/30/2010	12:13:07 AM	BCl3 valve closed
7/30/2010	12:13:07 AM	PH3 valve closed
7/30/2010	12:13:07 AM	SiCl4 pre valve closed
7/30/2010	12:13:07 AM	SiCl4 post valve closed
7/30/2010	12:13:07 AM	Main Vac valve closed
7/30/2010	12:13:07 AM	Bypass valve closed
7/30/2010	12:13:07 AM	Helium valve opened
7/30/2010	12:13:07 AM	Bubbler valve opened
7/30/2010	12:13:07 AM	Helium MFC set to  500.000000
7/30/2010	12:13:07 AM	H2 MFC set to  0.000000
7/30/2010	12:13:07 AM	BCl3 MFC set to  0.000000
7/30/2010	12:13:07 AM	PHl3 MFC set to  0.000000
7/30/2010	12:13:07 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:13:07 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:13:07 AM	Tube furnace set to 0
7/30/2010	12:33:07 AM	Helium valve closed
7/30/2010	12:33:07 AM	H2 valve closed
7/30/2010	12:33:07 AM	BCl3 valve closed
7/30/2010	12:33:07 AM	PH3 valve closed
7/30/2010	12:33:07 AM	SiCl4 pre valve closed
7/30/2010	12:33:07 AM	SiCl4 post valve closed
7/30/2010	12:33:07 AM	Main Vac valve closed
7/30/2010	12:33:07 AM	Bypass valve closed
7/30/2010	12:33:07 AM	Bubbler valve closed
7/30/2010	12:33:07 AM	Helium MFC set to  0.000000
7/30/2010	12:33:07 AM	H2 MFC set to  0.000000
7/30/2010	12:33:07 AM	BCl3 MFC set to  0.000000
7/30/2010	12:33:07 AM	PHl3 MFC set to  0.000000
7/30/2010	12:33:07 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:33:07 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:33:07 AM	Tube furnace set to 0
7/30/2010	12:33:07 AM	Run finished at 12:33 AM
7/30/2010	12:34:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	12:34:09 AM	Recipe started at 12:34 AM
7/30/2010	12:34:09 AM	H2 valve closed
7/30/2010	12:34:09 AM	BCl3 valve closed
7/30/2010	12:34:09 AM	PH3 valve closed
7/30/2010	12:34:09 AM	SiCl4 pre valve closed
7/30/2010	12:34:09 AM	SiCl4 post valve closed
7/30/2010	12:34:09 AM	Main Vac valve closed
7/30/2010	12:34:09 AM	Bypass valve closed
7/30/2010	12:34:09 AM	Bubbler valve closed
7/30/2010	12:34:09 AM	Helium valve opened
7/30/2010	12:34:09 AM	Helium MFC set to  500.000000
7/30/2010	12:34:09 AM	H2 MFC set to  0.000000
7/30/2010	12:34:09 AM	BCl3 MFC set to  0.000000
7/30/2010	12:34:09 AM	PHl3 MFC set to  0.000000
7/30/2010	12:34:09 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:34:09 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:34:09 AM	Tube furnace set to 0
7/30/2010	12:34:09 AM	Helium valve closed
7/30/2010	12:34:09 AM	H2 valve closed
7/30/2010	12:34:09 AM	BCl3 valve closed
7/30/2010	12:34:09 AM	PH3 valve closed
7/30/2010	12:34:09 AM	SiCl4 pre valve closed
7/30/2010	12:34:09 AM	SiCl4 post valve closed
7/30/2010	12:34:09 AM	Main Vac valve closed
7/30/2010	12:34:09 AM	Bypass valve closed
7/30/2010	12:34:09 AM	Bubbler valve closed
7/30/2010	12:34:09 AM	Helium MFC set to  0.000000
7/30/2010	12:34:09 AM	H2 MFC set to  0.000000
7/30/2010	12:34:09 AM	BCl3 MFC set to  0.000000
7/30/2010	12:34:09 AM	PHl3 MFC set to  0.000000
7/30/2010	12:34:09 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:34:09 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:34:09 AM	Tube furnace set to 0
7/30/2010	12:34:10 AM	Run finished at 12:34 AM
7/30/2010	12:34:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	12:45:19 AM	Bypass valve opened
7/30/2010	12:45:45 AM	Main Vac valve opened
7/30/2010	12:45:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	12:45:58 AM	Recipe started at 12:45 AM
7/30/2010	12:45:58 AM	Helium valve closed
7/30/2010	12:45:58 AM	H2 valve closed
7/30/2010	12:45:58 AM	BCl3 valve closed
7/30/2010	12:45:58 AM	PH3 valve closed
7/30/2010	12:45:58 AM	SiCl4 pre valve closed
7/30/2010	12:45:58 AM	SiCl4 post valve closed
7/30/2010	12:45:58 AM	Main Vac valve closed
7/30/2010	12:45:58 AM	Bubbler valve closed
7/30/2010	12:45:58 AM	Bypass valve opened
7/30/2010	12:45:58 AM	Helium MFC set to  0.000000
7/30/2010	12:45:58 AM	H2 MFC set to  0.000000
7/30/2010	12:45:58 AM	BCl3 MFC set to  0.000000
7/30/2010	12:45:58 AM	PHl3 MFC set to  0.000000
7/30/2010	12:45:58 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:45:58 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:45:58 AM	Tube furnace set to 0
7/30/2010	12:45:58 AM	Helium valve closed
7/30/2010	12:45:58 AM	H2 valve closed
7/30/2010	12:45:58 AM	BCl3 valve closed
7/30/2010	12:45:58 AM	PH3 valve closed
7/30/2010	12:45:58 AM	SiCl4 pre valve closed
7/30/2010	12:45:58 AM	SiCl4 post valve closed
7/30/2010	12:45:58 AM	Bubbler valve closed
7/30/2010	12:45:58 AM	Main Vac valve opened
7/30/2010	12:45:58 AM	Bypass valve opened
7/30/2010	12:45:58 AM	Helium MFC set to  0.000000
7/30/2010	12:45:58 AM	H2 MFC set to  0.000000
7/30/2010	12:45:58 AM	BCl3 MFC set to  0.000000
7/30/2010	12:45:58 AM	PHl3 MFC set to  0.000000
7/30/2010	12:45:58 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:45:58 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:45:58 AM	Tube furnace set to 0
7/30/2010	12:46:58 AM	H2 valve closed
7/30/2010	12:46:58 AM	BCl3 valve closed
7/30/2010	12:46:58 AM	PH3 valve closed
7/30/2010	12:46:58 AM	SiCl4 pre valve closed
7/30/2010	12:46:58 AM	SiCl4 post valve closed
7/30/2010	12:46:58 AM	Bubbler valve closed
7/30/2010	12:46:58 AM	Helium valve opened
7/30/2010	12:46:58 AM	Main Vac valve opened
7/30/2010	12:46:58 AM	Bypass valve opened
7/30/2010	12:46:58 AM	Helium MFC set to  100.000000
7/30/2010	12:46:58 AM	H2 MFC set to  0.000000
7/30/2010	12:46:58 AM	BCl3 MFC set to  0.000000
7/30/2010	12:46:58 AM	PHl3 MFC set to  0.000000
7/30/2010	12:46:58 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:46:58 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:46:58 AM	Tube furnace set to 0
7/30/2010	12:55:58 AM	Helium valve closed
7/30/2010	12:55:58 AM	H2 valve closed
7/30/2010	12:55:58 AM	BCl3 valve closed
7/30/2010	12:55:58 AM	PH3 valve closed
7/30/2010	12:55:58 AM	SiCl4 pre valve closed
7/30/2010	12:55:58 AM	SiCl4 post valve closed
7/30/2010	12:55:58 AM	Bubbler valve closed
7/30/2010	12:55:58 AM	Main Vac valve opened
7/30/2010	12:55:58 AM	Bypass valve opened
7/30/2010	12:55:58 AM	Helium MFC set to  0.000000
7/30/2010	12:55:58 AM	H2 MFC set to  0.000000
7/30/2010	12:55:58 AM	BCl3 MFC set to  0.000000
7/30/2010	12:55:58 AM	PHl3 MFC set to  0.000000
7/30/2010	12:55:58 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:55:58 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:55:59 AM	Tube furnace set to 0
7/30/2010	12:56:59 AM	H2 valve closed
7/30/2010	12:56:59 AM	BCl3 valve closed
7/30/2010	12:56:59 AM	PH3 valve closed
7/30/2010	12:56:59 AM	SiCl4 pre valve closed
7/30/2010	12:56:59 AM	SiCl4 post valve closed
7/30/2010	12:56:59 AM	Bubbler valve closed
7/30/2010	12:56:59 AM	Helium valve opened
7/30/2010	12:56:59 AM	Main Vac valve opened
7/30/2010	12:56:59 AM	Bypass valve opened
7/30/2010	12:56:59 AM	Helium MFC set to  100.000000
7/30/2010	12:56:59 AM	H2 MFC set to  0.000000
7/30/2010	12:56:59 AM	BCl3 MFC set to  0.000000
7/30/2010	12:56:59 AM	PHl3 MFC set to  0.000000
7/30/2010	12:56:59 AM	SiCl4 MFC set to  0.000000
7/30/2010	12:56:59 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:56:59 AM	Tube furnace set to 0
7/30/2010	1:05:59 AM	Helium valve closed
7/30/2010	1:05:59 AM	H2 valve closed
7/30/2010	1:05:59 AM	BCl3 valve closed
7/30/2010	1:05:59 AM	PH3 valve closed
7/30/2010	1:05:59 AM	SiCl4 pre valve closed
7/30/2010	1:05:59 AM	SiCl4 post valve closed
7/30/2010	1:05:59 AM	Bubbler valve closed
7/30/2010	1:05:59 AM	Main Vac valve opened
7/30/2010	1:05:59 AM	Bypass valve opened
7/30/2010	1:05:59 AM	Helium MFC set to  0.000000
7/30/2010	1:05:59 AM	H2 MFC set to  0.000000
7/30/2010	1:05:59 AM	BCl3 MFC set to  0.000000
7/30/2010	1:05:59 AM	PHl3 MFC set to  0.000000
7/30/2010	1:05:59 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:05:59 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:05:59 AM	Tube furnace set to 0
7/30/2010	1:06:59 AM	H2 valve closed
7/30/2010	1:06:59 AM	BCl3 valve closed
7/30/2010	1:06:59 AM	PH3 valve closed
7/30/2010	1:06:59 AM	SiCl4 pre valve closed
7/30/2010	1:06:59 AM	SiCl4 post valve closed
7/30/2010	1:06:59 AM	Bubbler valve closed
7/30/2010	1:06:59 AM	Helium valve opened
7/30/2010	1:06:59 AM	Main Vac valve opened
7/30/2010	1:06:59 AM	Bypass valve opened
7/30/2010	1:06:59 AM	Helium MFC set to  100.000000
7/30/2010	1:06:59 AM	H2 MFC set to  0.000000
7/30/2010	1:06:59 AM	BCl3 MFC set to  0.000000
7/30/2010	1:06:59 AM	PHl3 MFC set to  0.000000
7/30/2010	1:06:59 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:06:59 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:06:59 AM	Tube furnace set to 0
7/30/2010	1:10:12 AM	Helium valve closed
7/30/2010	1:10:12 AM	H2 valve closed
7/30/2010	1:10:12 AM	BCl3 valve closed
7/30/2010	1:10:12 AM	PH3 valve closed
7/30/2010	1:10:12 AM	SiCl4 pre valve closed
7/30/2010	1:10:12 AM	SiCl4 post valve closed
7/30/2010	1:10:12 AM	Bubbler valve closed
7/30/2010	1:10:12 AM	Main Vac valve opened
7/30/2010	1:10:12 AM	Bypass valve opened
7/30/2010	1:10:12 AM	Helium MFC set to  0.000000
7/30/2010	1:10:12 AM	H2 MFC set to  0.000000
7/30/2010	1:10:12 AM	BCl3 MFC set to  0.000000
7/30/2010	1:10:12 AM	PHl3 MFC set to  0.000000
7/30/2010	1:10:12 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:10:12 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:10:13 AM	Tube furnace set to 0
7/30/2010	1:10:14 AM	Run finished at 1:10 AM
7/30/2010	1:10:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	1:10:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	1:10:54 AM	Recipe started at 1:10 AM
7/30/2010	1:10:54 AM	Helium valve closed
7/30/2010	1:10:54 AM	H2 valve closed
7/30/2010	1:10:54 AM	BCl3 valve closed
7/30/2010	1:10:54 AM	PH3 valve closed
7/30/2010	1:10:54 AM	SiCl4 pre valve closed
7/30/2010	1:10:54 AM	SiCl4 post valve closed
7/30/2010	1:10:54 AM	Main Vac valve closed
7/30/2010	1:10:54 AM	Bubbler valve closed
7/30/2010	1:10:54 AM	Bypass valve opened
7/30/2010	1:10:54 AM	Helium MFC set to  0.000000
7/30/2010	1:10:54 AM	H2 MFC set to  0.000000
7/30/2010	1:10:54 AM	BCl3 MFC set to  0.000000
7/30/2010	1:10:54 AM	PHl3 MFC set to  0.000000
7/30/2010	1:10:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:10:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:10:54 AM	Tube furnace set to 0
7/30/2010	1:10:54 AM	Helium valve closed
7/30/2010	1:10:54 AM	H2 valve closed
7/30/2010	1:10:54 AM	BCl3 valve closed
7/30/2010	1:10:54 AM	PH3 valve closed
7/30/2010	1:10:54 AM	SiCl4 pre valve closed
7/30/2010	1:10:54 AM	SiCl4 post valve closed
7/30/2010	1:10:54 AM	Bubbler valve closed
7/30/2010	1:10:54 AM	Main Vac valve opened
7/30/2010	1:10:54 AM	Bypass valve opened
7/30/2010	1:10:54 AM	Helium MFC set to  0.000000
7/30/2010	1:10:54 AM	H2 MFC set to  0.000000
7/30/2010	1:10:54 AM	BCl3 MFC set to  0.000000
7/30/2010	1:10:54 AM	PHl3 MFC set to  0.000000
7/30/2010	1:10:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:10:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:10:54 AM	Tube furnace set to 0
7/30/2010	1:11:54 AM	H2 valve closed
7/30/2010	1:11:54 AM	BCl3 valve closed
7/30/2010	1:11:54 AM	PH3 valve closed
7/30/2010	1:11:54 AM	SiCl4 pre valve closed
7/30/2010	1:11:54 AM	SiCl4 post valve closed
7/30/2010	1:11:54 AM	Bubbler valve closed
7/30/2010	1:11:54 AM	Helium valve opened
7/30/2010	1:11:54 AM	Main Vac valve opened
7/30/2010	1:11:54 AM	Bypass valve opened
7/30/2010	1:11:54 AM	Helium MFC set to  100.000000
7/30/2010	1:11:54 AM	H2 MFC set to  0.000000
7/30/2010	1:11:54 AM	BCl3 MFC set to  0.000000
7/30/2010	1:11:54 AM	PHl3 MFC set to  0.000000
7/30/2010	1:11:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:11:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:11:55 AM	Tube furnace set to 0
7/30/2010	1:20:55 AM	Helium valve closed
7/30/2010	1:20:55 AM	H2 valve closed
7/30/2010	1:20:55 AM	BCl3 valve closed
7/30/2010	1:20:55 AM	PH3 valve closed
7/30/2010	1:20:55 AM	SiCl4 pre valve closed
7/30/2010	1:20:55 AM	SiCl4 post valve closed
7/30/2010	1:20:55 AM	Bubbler valve closed
7/30/2010	1:20:55 AM	Main Vac valve opened
7/30/2010	1:20:55 AM	Bypass valve opened
7/30/2010	1:20:55 AM	Helium MFC set to  0.000000
7/30/2010	1:20:55 AM	H2 MFC set to  0.000000
7/30/2010	1:20:55 AM	BCl3 MFC set to  0.000000
7/30/2010	1:20:55 AM	PHl3 MFC set to  0.000000
7/30/2010	1:20:55 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:20:55 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:20:55 AM	Tube furnace set to 0
7/30/2010	1:21:55 AM	H2 valve closed
7/30/2010	1:21:55 AM	BCl3 valve closed
7/30/2010	1:21:55 AM	PH3 valve closed
7/30/2010	1:21:55 AM	SiCl4 pre valve closed
7/30/2010	1:21:55 AM	SiCl4 post valve closed
7/30/2010	1:21:55 AM	Bubbler valve closed
7/30/2010	1:21:55 AM	Helium valve opened
7/30/2010	1:21:55 AM	Main Vac valve opened
7/30/2010	1:21:55 AM	Bypass valve opened
7/30/2010	1:21:55 AM	Helium MFC set to  100.000000
7/30/2010	1:21:55 AM	H2 MFC set to  0.000000
7/30/2010	1:21:55 AM	BCl3 MFC set to  0.000000
7/30/2010	1:21:55 AM	PHl3 MFC set to  0.000000
7/30/2010	1:21:55 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:21:55 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:21:55 AM	Tube furnace set to 0
7/30/2010	1:28:43 AM	Helium valve closed
7/30/2010	1:28:43 AM	H2 valve closed
7/30/2010	1:28:43 AM	BCl3 valve closed
7/30/2010	1:28:43 AM	PH3 valve closed
7/30/2010	1:28:43 AM	SiCl4 pre valve closed
7/30/2010	1:28:43 AM	SiCl4 post valve closed
7/30/2010	1:28:43 AM	Bubbler valve closed
7/30/2010	1:28:43 AM	Main Vac valve opened
7/30/2010	1:28:43 AM	Bypass valve opened
7/30/2010	1:28:43 AM	Helium MFC set to  0.000000
7/30/2010	1:28:43 AM	H2 MFC set to  0.000000
7/30/2010	1:28:43 AM	BCl3 MFC set to  0.000000
7/30/2010	1:28:43 AM	PHl3 MFC set to  0.000000
7/30/2010	1:28:43 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:28:43 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:28:43 AM	Tube furnace set to 0
7/30/2010	1:28:44 AM	H2 valve closed
7/30/2010	1:28:44 AM	BCl3 valve closed
7/30/2010	1:28:44 AM	PH3 valve closed
7/30/2010	1:28:44 AM	SiCl4 pre valve closed
7/30/2010	1:28:44 AM	SiCl4 post valve closed
7/30/2010	1:28:44 AM	Bubbler valve closed
7/30/2010	1:28:44 AM	Helium valve opened
7/30/2010	1:28:44 AM	Main Vac valve opened
7/30/2010	1:28:44 AM	Bypass valve opened
7/30/2010	1:28:44 AM	Helium MFC set to  100.000000
7/30/2010	1:28:44 AM	H2 MFC set to  0.000000
7/30/2010	1:28:44 AM	BCl3 MFC set to  0.000000
7/30/2010	1:28:44 AM	PHl3 MFC set to  0.000000
7/30/2010	1:28:44 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:28:44 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:28:44 AM	Tube furnace set to 0
7/30/2010	1:28:45 AM	Helium valve closed
7/30/2010	1:28:45 AM	H2 valve closed
7/30/2010	1:28:45 AM	BCl3 valve closed
7/30/2010	1:28:45 AM	PH3 valve closed
7/30/2010	1:28:45 AM	SiCl4 pre valve closed
7/30/2010	1:28:45 AM	SiCl4 post valve closed
7/30/2010	1:28:45 AM	Bubbler valve closed
7/30/2010	1:28:45 AM	Main Vac valve opened
7/30/2010	1:28:45 AM	Bypass valve opened
7/30/2010	1:28:45 AM	Helium MFC set to  0.000000
7/30/2010	1:28:45 AM	H2 MFC set to  0.000000
7/30/2010	1:28:45 AM	BCl3 MFC set to  0.000000
7/30/2010	1:28:45 AM	PHl3 MFC set to  0.000000
7/30/2010	1:28:45 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:28:45 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:28:45 AM	Tube furnace set to 0
7/30/2010	1:28:46 AM	Run finished at 1:28 AM
7/30/2010	1:28:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	1:29:30 AM	Recipe started at 1:29 AM
7/30/2010	1:29:31 AM	Helium valve closed
7/30/2010	1:29:31 AM	BCl3 valve closed
7/30/2010	1:29:31 AM	PH3 valve closed
7/30/2010	1:29:31 AM	SiCl4 pre valve closed
7/30/2010	1:29:31 AM	SiCl4 post valve closed
7/30/2010	1:29:31 AM	Main Vac valve closed
7/30/2010	1:29:31 AM	Bypass valve closed
7/30/2010	1:29:31 AM	Bubbler valve closed
7/30/2010	1:29:31 AM	H2 valve opened
7/30/2010	1:29:31 AM	Helium MFC set to  0.000000
7/30/2010	1:29:31 AM	H2 MFC set to  500.000000
7/30/2010	1:29:31 AM	BCl3 MFC set to  0.000000
7/30/2010	1:29:31 AM	PHl3 MFC set to  0.000000
7/30/2010	1:29:31 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:29:31 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:29:31 AM	Tube furnace set to 1000
7/30/2010	1:30:49 AM	Helium valve closed
7/30/2010	1:30:49 AM	BCl3 valve closed
7/30/2010	1:30:49 AM	PH3 valve closed
7/30/2010	1:30:49 AM	SiCl4 pre valve closed
7/30/2010	1:30:49 AM	SiCl4 post valve closed
7/30/2010	1:30:49 AM	Main Vac valve closed
7/30/2010	1:30:49 AM	Bypass valve closed
7/30/2010	1:30:49 AM	H2 valve opened
7/30/2010	1:30:49 AM	Bubbler valve opened
7/30/2010	1:30:49 AM	Helium MFC set to  0.000000
7/30/2010	1:30:49 AM	H2 MFC set to  500.000000
7/30/2010	1:30:49 AM	BCl3 MFC set to  0.000000
7/30/2010	1:30:49 AM	PHl3 MFC set to  0.000000
7/30/2010	1:30:49 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:30:49 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:30:49 AM	Tube furnace set to 1000
7/30/2010	1:50:49 AM	Helium valve closed
7/30/2010	1:50:49 AM	PH3 valve closed
7/30/2010	1:50:49 AM	Main Vac valve closed
7/30/2010	1:50:49 AM	Bypass valve closed
7/30/2010	1:50:49 AM	H2 valve opened
7/30/2010	1:50:49 AM	BCl3 valve opened
7/30/2010	1:50:49 AM	SiCl4 pre valve opened
7/30/2010	1:50:49 AM	SiCl4 post valve opened
7/30/2010	1:50:49 AM	Bubbler valve opened
7/30/2010	1:50:49 AM	Helium MFC set to  0.000000
7/30/2010	1:50:49 AM	H2 MFC set to  500.000000
7/30/2010	1:50:49 AM	BCl3 MFC set to  35.000000
7/30/2010	1:50:49 AM	PHl3 MFC set to  0.000000
7/30/2010	1:50:49 AM	SiCl4 MFC set to  50.000000
7/30/2010	1:50:49 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:50:50 AM	Tube furnace set to 1000
7/30/2010	1:55:50 AM	Helium valve closed
7/30/2010	1:55:50 AM	BCl3 valve closed
7/30/2010	1:55:50 AM	PH3 valve closed
7/30/2010	1:55:50 AM	SiCl4 pre valve closed
7/30/2010	1:55:50 AM	SiCl4 post valve closed
7/30/2010	1:55:50 AM	Main Vac valve closed
7/30/2010	1:55:50 AM	Bypass valve closed
7/30/2010	1:55:50 AM	H2 valve opened
7/30/2010	1:55:50 AM	Bubbler valve opened
7/30/2010	1:55:50 AM	Helium MFC set to  0.000000
7/30/2010	1:55:50 AM	H2 MFC set to  500.000000
7/30/2010	1:55:50 AM	BCl3 MFC set to  0.000000
7/30/2010	1:55:50 AM	PHl3 MFC set to  0.000000
7/30/2010	1:55:50 AM	SiCl4 MFC set to  0.000000
7/30/2010	1:55:50 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:55:50 AM	Tube furnace set to 750
7/30/2010	2:15:50 AM	H2 valve closed
7/30/2010	2:15:50 AM	BCl3 valve closed
7/30/2010	2:15:50 AM	PH3 valve closed
7/30/2010	2:15:50 AM	SiCl4 pre valve closed
7/30/2010	2:15:50 AM	SiCl4 post valve closed
7/30/2010	2:15:50 AM	Main Vac valve closed
7/30/2010	2:15:50 AM	Bypass valve closed
7/30/2010	2:15:50 AM	Helium valve opened
7/30/2010	2:15:50 AM	Bubbler valve opened
7/30/2010	2:15:50 AM	Helium MFC set to  500.000000
7/30/2010	2:15:50 AM	H2 MFC set to  0.000000
7/30/2010	2:15:50 AM	BCl3 MFC set to  0.000000
7/30/2010	2:15:50 AM	PHl3 MFC set to  0.000000
7/30/2010	2:15:50 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:15:50 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:15:50 AM	Tube furnace set to 0
7/30/2010	2:25:10 AM	Run aborted at 2:25 AM
7/30/2010	2:25:10 AM	Helium valve closed
7/30/2010	2:25:10 AM	H2 valve closed
7/30/2010	2:25:10 AM	BCl3 valve closed
7/30/2010	2:25:10 AM	PH3 valve closed
7/30/2010	2:25:10 AM	SiCl4 pre valve closed
7/30/2010	2:25:10 AM	SiCl4 post valve closed
7/30/2010	2:25:10 AM	Bypass valve closed
7/30/2010	2:25:10 AM	Main Vac valve closed
7/30/2010	2:25:10 AM	Bubbler valve closed
7/30/2010	2:25:10 AM	Helium MFC set to  0.000000
7/30/2010	2:25:10 AM	H2 MFC set to  0.000000
7/30/2010	2:25:10 AM	BCl3 MFC set to  0.000000
7/30/2010	2:25:10 AM	PHl3 MFC set to  0.000000
7/30/2010	2:25:10 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:25:10 AM	Tube furnace set to 0
7/30/2010	2:25:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	2:25:12 AM	Recipe started at 2:25 AM
7/30/2010	2:25:12 AM	H2 valve closed
7/30/2010	2:25:12 AM	BCl3 valve closed
7/30/2010	2:25:12 AM	PH3 valve closed
7/30/2010	2:25:12 AM	SiCl4 pre valve closed
7/30/2010	2:25:12 AM	SiCl4 post valve closed
7/30/2010	2:25:12 AM	Main Vac valve closed
7/30/2010	2:25:12 AM	Bypass valve closed
7/30/2010	2:25:12 AM	Bubbler valve closed
7/30/2010	2:25:12 AM	Helium valve opened
7/30/2010	2:25:12 AM	Helium MFC set to  500.000000
7/30/2010	2:25:12 AM	H2 MFC set to  0.000000
7/30/2010	2:25:12 AM	BCl3 MFC set to  0.000000
7/30/2010	2:25:12 AM	PHl3 MFC set to  0.000000
7/30/2010	2:25:12 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:25:12 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:25:12 AM	Tube furnace set to 0
7/30/2010	2:25:14 AM	Helium valve closed
7/30/2010	2:25:14 AM	H2 valve closed
7/30/2010	2:25:14 AM	BCl3 valve closed
7/30/2010	2:25:14 AM	PH3 valve closed
7/30/2010	2:25:14 AM	SiCl4 pre valve closed
7/30/2010	2:25:14 AM	SiCl4 post valve closed
7/30/2010	2:25:14 AM	Main Vac valve closed
7/30/2010	2:25:14 AM	Bypass valve closed
7/30/2010	2:25:14 AM	Bubbler valve closed
7/30/2010	2:25:14 AM	Helium MFC set to  0.000000
7/30/2010	2:25:14 AM	H2 MFC set to  0.000000
7/30/2010	2:25:14 AM	BCl3 MFC set to  0.000000
7/30/2010	2:25:14 AM	PHl3 MFC set to  0.000000
7/30/2010	2:25:14 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:25:14 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:25:14 AM	Tube furnace set to 0
7/30/2010	2:25:14 AM	Run finished at 2:25 AM
7/30/2010	2:25:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	2:34:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	2:34:47 AM	Recipe started at 2:34 AM
7/30/2010	2:34:47 AM	Helium valve closed
7/30/2010	2:34:47 AM	H2 valve closed
7/30/2010	2:34:47 AM	BCl3 valve closed
7/30/2010	2:34:47 AM	PH3 valve closed
7/30/2010	2:34:47 AM	SiCl4 pre valve closed
7/30/2010	2:34:47 AM	SiCl4 post valve closed
7/30/2010	2:34:47 AM	Main Vac valve closed
7/30/2010	2:34:47 AM	Bubbler valve closed
7/30/2010	2:34:47 AM	Bypass valve opened
7/30/2010	2:34:47 AM	Helium MFC set to  0.000000
7/30/2010	2:34:47 AM	H2 MFC set to  0.000000
7/30/2010	2:34:47 AM	BCl3 MFC set to  0.000000
7/30/2010	2:34:47 AM	PHl3 MFC set to  0.000000
7/30/2010	2:34:47 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:34:47 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:34:47 AM	Tube furnace set to 0
7/30/2010	2:35:25 AM	Helium valve closed
7/30/2010	2:35:25 AM	H2 valve closed
7/30/2010	2:35:25 AM	BCl3 valve closed
7/30/2010	2:35:25 AM	PH3 valve closed
7/30/2010	2:35:25 AM	SiCl4 pre valve closed
7/30/2010	2:35:25 AM	SiCl4 post valve closed
7/30/2010	2:35:25 AM	Bubbler valve closed
7/30/2010	2:35:25 AM	Main Vac valve opened
7/30/2010	2:35:25 AM	Bypass valve opened
7/30/2010	2:35:25 AM	Helium MFC set to  0.000000
7/30/2010	2:35:25 AM	H2 MFC set to  0.000000
7/30/2010	2:35:25 AM	BCl3 MFC set to  0.000000
7/30/2010	2:35:25 AM	PHl3 MFC set to  0.000000
7/30/2010	2:35:25 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:35:25 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:35:25 AM	Tube furnace set to 0
7/30/2010	2:36:25 AM	H2 valve closed
7/30/2010	2:36:25 AM	BCl3 valve closed
7/30/2010	2:36:25 AM	PH3 valve closed
7/30/2010	2:36:25 AM	SiCl4 pre valve closed
7/30/2010	2:36:25 AM	SiCl4 post valve closed
7/30/2010	2:36:25 AM	Bubbler valve closed
7/30/2010	2:36:25 AM	Helium valve opened
7/30/2010	2:36:25 AM	Main Vac valve opened
7/30/2010	2:36:25 AM	Bypass valve opened
7/30/2010	2:36:25 AM	Helium MFC set to  100.000000
7/30/2010	2:36:25 AM	H2 MFC set to  0.000000
7/30/2010	2:36:25 AM	BCl3 MFC set to  0.000000
7/30/2010	2:36:25 AM	PHl3 MFC set to  0.000000
7/30/2010	2:36:25 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:36:25 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:36:25 AM	Tube furnace set to 0
7/30/2010	2:45:25 AM	Helium valve closed
7/30/2010	2:45:25 AM	H2 valve closed
7/30/2010	2:45:25 AM	BCl3 valve closed
7/30/2010	2:45:25 AM	PH3 valve closed
7/30/2010	2:45:25 AM	SiCl4 pre valve closed
7/30/2010	2:45:25 AM	SiCl4 post valve closed
7/30/2010	2:45:25 AM	Bubbler valve closed
7/30/2010	2:45:25 AM	Main Vac valve opened
7/30/2010	2:45:25 AM	Bypass valve opened
7/30/2010	2:45:25 AM	Helium MFC set to  0.000000
7/30/2010	2:45:25 AM	H2 MFC set to  0.000000
7/30/2010	2:45:25 AM	BCl3 MFC set to  0.000000
7/30/2010	2:45:25 AM	PHl3 MFC set to  0.000000
7/30/2010	2:45:25 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:45:25 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:45:25 AM	Tube furnace set to 0
7/30/2010	2:46:25 AM	H2 valve closed
7/30/2010	2:46:25 AM	BCl3 valve closed
7/30/2010	2:46:25 AM	PH3 valve closed
7/30/2010	2:46:25 AM	SiCl4 pre valve closed
7/30/2010	2:46:25 AM	SiCl4 post valve closed
7/30/2010	2:46:25 AM	Bubbler valve closed
7/30/2010	2:46:25 AM	Helium valve opened
7/30/2010	2:46:25 AM	Main Vac valve opened
7/30/2010	2:46:25 AM	Bypass valve opened
7/30/2010	2:46:25 AM	Helium MFC set to  100.000000
7/30/2010	2:46:25 AM	H2 MFC set to  0.000000
7/30/2010	2:46:25 AM	BCl3 MFC set to  0.000000
7/30/2010	2:46:25 AM	PHl3 MFC set to  0.000000
7/30/2010	2:46:25 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:46:25 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:46:25 AM	Tube furnace set to 0
7/30/2010	2:55:25 AM	Helium valve closed
7/30/2010	2:55:25 AM	H2 valve closed
7/30/2010	2:55:25 AM	BCl3 valve closed
7/30/2010	2:55:25 AM	PH3 valve closed
7/30/2010	2:55:25 AM	SiCl4 pre valve closed
7/30/2010	2:55:25 AM	SiCl4 post valve closed
7/30/2010	2:55:25 AM	Bubbler valve closed
7/30/2010	2:55:25 AM	Main Vac valve opened
7/30/2010	2:55:25 AM	Bypass valve opened
7/30/2010	2:55:25 AM	Helium MFC set to  0.000000
7/30/2010	2:55:25 AM	H2 MFC set to  0.000000
7/30/2010	2:55:25 AM	BCl3 MFC set to  0.000000
7/30/2010	2:55:25 AM	PHl3 MFC set to  0.000000
7/30/2010	2:55:25 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:55:25 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:55:25 AM	Tube furnace set to 0
7/30/2010	2:56:26 AM	H2 valve closed
7/30/2010	2:56:26 AM	BCl3 valve closed
7/30/2010	2:56:26 AM	PH3 valve closed
7/30/2010	2:56:26 AM	SiCl4 pre valve closed
7/30/2010	2:56:26 AM	SiCl4 post valve closed
7/30/2010	2:56:26 AM	Bubbler valve closed
7/30/2010	2:56:26 AM	Helium valve opened
7/30/2010	2:56:26 AM	Main Vac valve opened
7/30/2010	2:56:26 AM	Bypass valve opened
7/30/2010	2:56:26 AM	Helium MFC set to  100.000000
7/30/2010	2:56:26 AM	H2 MFC set to  0.000000
7/30/2010	2:56:26 AM	BCl3 MFC set to  0.000000
7/30/2010	2:56:26 AM	PHl3 MFC set to  0.000000
7/30/2010	2:56:26 AM	SiCl4 MFC set to  0.000000
7/30/2010	2:56:26 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:56:26 AM	Tube furnace set to 0
7/30/2010	3:05:26 AM	Helium valve closed
7/30/2010	3:05:26 AM	H2 valve closed
7/30/2010	3:05:26 AM	BCl3 valve closed
7/30/2010	3:05:26 AM	PH3 valve closed
7/30/2010	3:05:26 AM	SiCl4 pre valve closed
7/30/2010	3:05:26 AM	SiCl4 post valve closed
7/30/2010	3:05:26 AM	Bubbler valve closed
7/30/2010	3:05:26 AM	Main Vac valve opened
7/30/2010	3:05:26 AM	Bypass valve opened
7/30/2010	3:05:26 AM	Helium MFC set to  0.000000
7/30/2010	3:05:26 AM	H2 MFC set to  0.000000
7/30/2010	3:05:26 AM	BCl3 MFC set to  0.000000
7/30/2010	3:05:26 AM	PHl3 MFC set to  0.000000
7/30/2010	3:05:26 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:05:26 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:05:26 AM	Tube furnace set to 0
7/30/2010	3:05:27 AM	Run finished at 3:05 AM
7/30/2010	3:05:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	3:07:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	3:07:31 AM	Recipe started at 3:07 AM
7/30/2010	3:07:31 AM	Helium valve closed
7/30/2010	3:07:31 AM	H2 valve closed
7/30/2010	3:07:31 AM	BCl3 valve closed
7/30/2010	3:07:31 AM	PH3 valve closed
7/30/2010	3:07:31 AM	SiCl4 pre valve closed
7/30/2010	3:07:31 AM	SiCl4 post valve closed
7/30/2010	3:07:31 AM	Main Vac valve closed
7/30/2010	3:07:31 AM	Bubbler valve closed
7/30/2010	3:07:31 AM	Bypass valve opened
7/30/2010	3:07:31 AM	Helium MFC set to  0.000000
7/30/2010	3:07:31 AM	H2 MFC set to  0.000000
7/30/2010	3:07:31 AM	BCl3 MFC set to  0.000000
7/30/2010	3:07:31 AM	PHl3 MFC set to  0.000000
7/30/2010	3:07:31 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:07:31 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:07:31 AM	Tube furnace set to 0
7/30/2010	3:07:32 AM	Helium valve closed
7/30/2010	3:07:32 AM	H2 valve closed
7/30/2010	3:07:32 AM	BCl3 valve closed
7/30/2010	3:07:32 AM	PH3 valve closed
7/30/2010	3:07:32 AM	SiCl4 pre valve closed
7/30/2010	3:07:32 AM	SiCl4 post valve closed
7/30/2010	3:07:32 AM	Bubbler valve closed
7/30/2010	3:07:32 AM	Main Vac valve opened
7/30/2010	3:07:32 AM	Bypass valve opened
7/30/2010	3:07:32 AM	Helium MFC set to  0.000000
7/30/2010	3:07:32 AM	H2 MFC set to  0.000000
7/30/2010	3:07:32 AM	BCl3 MFC set to  0.000000
7/30/2010	3:07:32 AM	PHl3 MFC set to  0.000000
7/30/2010	3:07:32 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:07:32 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:07:32 AM	Tube furnace set to 0
7/30/2010	3:07:39 AM	H2 valve closed
7/30/2010	3:07:39 AM	BCl3 valve closed
7/30/2010	3:07:39 AM	PH3 valve closed
7/30/2010	3:07:39 AM	SiCl4 pre valve closed
7/30/2010	3:07:39 AM	SiCl4 post valve closed
7/30/2010	3:07:39 AM	Bubbler valve closed
7/30/2010	3:07:39 AM	Helium valve opened
7/30/2010	3:07:39 AM	Main Vac valve opened
7/30/2010	3:07:39 AM	Bypass valve opened
7/30/2010	3:07:39 AM	Helium MFC set to  100.000000
7/30/2010	3:07:39 AM	H2 MFC set to  0.000000
7/30/2010	3:07:39 AM	BCl3 MFC set to  0.000000
7/30/2010	3:07:39 AM	PHl3 MFC set to  0.000000
7/30/2010	3:07:39 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:07:39 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:07:39 AM	Tube furnace set to 0
7/30/2010	3:16:39 AM	Helium valve closed
7/30/2010	3:16:39 AM	H2 valve closed
7/30/2010	3:16:39 AM	BCl3 valve closed
7/30/2010	3:16:39 AM	PH3 valve closed
7/30/2010	3:16:39 AM	SiCl4 pre valve closed
7/30/2010	3:16:39 AM	SiCl4 post valve closed
7/30/2010	3:16:39 AM	Bubbler valve closed
7/30/2010	3:16:39 AM	Main Vac valve opened
7/30/2010	3:16:39 AM	Bypass valve opened
7/30/2010	3:16:39 AM	Helium MFC set to  0.000000
7/30/2010	3:16:39 AM	H2 MFC set to  0.000000
7/30/2010	3:16:39 AM	BCl3 MFC set to  0.000000
7/30/2010	3:16:39 AM	PHl3 MFC set to  0.000000
7/30/2010	3:16:39 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:16:39 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:16:39 AM	Tube furnace set to 0
7/30/2010	3:17:39 AM	H2 valve closed
7/30/2010	3:17:39 AM	BCl3 valve closed
7/30/2010	3:17:39 AM	PH3 valve closed
7/30/2010	3:17:39 AM	SiCl4 pre valve closed
7/30/2010	3:17:39 AM	SiCl4 post valve closed
7/30/2010	3:17:39 AM	Bubbler valve closed
7/30/2010	3:17:39 AM	Helium valve opened
7/30/2010	3:17:39 AM	Main Vac valve opened
7/30/2010	3:17:39 AM	Bypass valve opened
7/30/2010	3:17:39 AM	Helium MFC set to  100.000000
7/30/2010	3:17:39 AM	H2 MFC set to  0.000000
7/30/2010	3:17:39 AM	BCl3 MFC set to  0.000000
7/30/2010	3:17:39 AM	PHl3 MFC set to  0.000000
7/30/2010	3:17:39 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:17:39 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:17:39 AM	Tube furnace set to 0
7/30/2010	3:26:39 AM	Helium valve closed
7/30/2010	3:26:39 AM	H2 valve closed
7/30/2010	3:26:39 AM	BCl3 valve closed
7/30/2010	3:26:39 AM	PH3 valve closed
7/30/2010	3:26:39 AM	SiCl4 pre valve closed
7/30/2010	3:26:39 AM	SiCl4 post valve closed
7/30/2010	3:26:39 AM	Bubbler valve closed
7/30/2010	3:26:39 AM	Main Vac valve opened
7/30/2010	3:26:39 AM	Bypass valve opened
7/30/2010	3:26:39 AM	Helium MFC set to  0.000000
7/30/2010	3:26:39 AM	H2 MFC set to  0.000000
7/30/2010	3:26:39 AM	BCl3 MFC set to  0.000000
7/30/2010	3:26:39 AM	PHl3 MFC set to  0.000000
7/30/2010	3:26:39 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:26:39 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:26:39 AM	Tube furnace set to 0
7/30/2010	3:27:40 AM	H2 valve closed
7/30/2010	3:27:40 AM	BCl3 valve closed
7/30/2010	3:27:40 AM	PH3 valve closed
7/30/2010	3:27:40 AM	SiCl4 pre valve closed
7/30/2010	3:27:40 AM	SiCl4 post valve closed
7/30/2010	3:27:40 AM	Bubbler valve closed
7/30/2010	3:27:40 AM	Helium valve opened
7/30/2010	3:27:40 AM	Main Vac valve opened
7/30/2010	3:27:40 AM	Bypass valve opened
7/30/2010	3:27:40 AM	Helium MFC set to  100.000000
7/30/2010	3:27:40 AM	H2 MFC set to  0.000000
7/30/2010	3:27:40 AM	BCl3 MFC set to  0.000000
7/30/2010	3:27:40 AM	PHl3 MFC set to  0.000000
7/30/2010	3:27:40 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:27:40 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:27:40 AM	Tube furnace set to 0
7/30/2010	3:28:31 AM	Helium valve closed
7/30/2010	3:28:31 AM	H2 valve closed
7/30/2010	3:28:31 AM	BCl3 valve closed
7/30/2010	3:28:31 AM	PH3 valve closed
7/30/2010	3:28:31 AM	SiCl4 pre valve closed
7/30/2010	3:28:31 AM	SiCl4 post valve closed
7/30/2010	3:28:31 AM	Bubbler valve closed
7/30/2010	3:28:31 AM	Main Vac valve opened
7/30/2010	3:28:31 AM	Bypass valve opened
7/30/2010	3:28:31 AM	Helium MFC set to  0.000000
7/30/2010	3:28:31 AM	H2 MFC set to  0.000000
7/30/2010	3:28:31 AM	BCl3 MFC set to  0.000000
7/30/2010	3:28:31 AM	PHl3 MFC set to  0.000000
7/30/2010	3:28:31 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:28:31 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:28:31 AM	Tube furnace set to 0
7/30/2010	3:28:32 AM	Run finished at 3:28 AM
7/30/2010	3:28:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	3:29:20 AM	Recipe started at 3:29 AM
7/30/2010	3:29:20 AM	Helium valve closed
7/30/2010	3:29:20 AM	BCl3 valve closed
7/30/2010	3:29:20 AM	PH3 valve closed
7/30/2010	3:29:20 AM	SiCl4 pre valve closed
7/30/2010	3:29:20 AM	SiCl4 post valve closed
7/30/2010	3:29:20 AM	Main Vac valve closed
7/30/2010	3:29:20 AM	Bypass valve closed
7/30/2010	3:29:20 AM	Bubbler valve closed
7/30/2010	3:29:20 AM	H2 valve opened
7/30/2010	3:29:20 AM	Helium MFC set to  0.000000
7/30/2010	3:29:20 AM	H2 MFC set to  500.000000
7/30/2010	3:29:20 AM	BCl3 MFC set to  0.000000
7/30/2010	3:29:20 AM	PHl3 MFC set to  0.000000
7/30/2010	3:29:20 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:29:20 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:29:20 AM	Tube furnace set to 1000
7/30/2010	3:30:38 AM	Helium valve closed
7/30/2010	3:30:38 AM	BCl3 valve closed
7/30/2010	3:30:38 AM	PH3 valve closed
7/30/2010	3:30:38 AM	SiCl4 pre valve closed
7/30/2010	3:30:38 AM	SiCl4 post valve closed
7/30/2010	3:30:38 AM	Main Vac valve closed
7/30/2010	3:30:38 AM	Bypass valve closed
7/30/2010	3:30:38 AM	H2 valve opened
7/30/2010	3:30:38 AM	Bubbler valve opened
7/30/2010	3:30:38 AM	Helium MFC set to  0.000000
7/30/2010	3:30:38 AM	H2 MFC set to  500.000000
7/30/2010	3:30:38 AM	BCl3 MFC set to  0.000000
7/30/2010	3:30:38 AM	PHl3 MFC set to  0.000000
7/30/2010	3:30:38 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:30:38 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:30:38 AM	Tube furnace set to 1000
7/30/2010	3:50:38 AM	Helium valve closed
7/30/2010	3:50:38 AM	PH3 valve closed
7/30/2010	3:50:38 AM	Main Vac valve closed
7/30/2010	3:50:38 AM	Bypass valve closed
7/30/2010	3:50:38 AM	H2 valve opened
7/30/2010	3:50:38 AM	BCl3 valve opened
7/30/2010	3:50:38 AM	SiCl4 pre valve opened
7/30/2010	3:50:38 AM	SiCl4 post valve opened
7/30/2010	3:50:38 AM	Bubbler valve opened
7/30/2010	3:50:38 AM	Helium MFC set to  0.000000
7/30/2010	3:50:38 AM	H2 MFC set to  500.000000
7/30/2010	3:50:38 AM	BCl3 MFC set to  35.000000
7/30/2010	3:50:38 AM	PHl3 MFC set to  0.000000
7/30/2010	3:50:38 AM	SiCl4 MFC set to  50.000000
7/30/2010	3:50:38 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:50:38 AM	Tube furnace set to 1000
7/30/2010	3:55:38 AM	Helium valve closed
7/30/2010	3:55:38 AM	BCl3 valve closed
7/30/2010	3:55:38 AM	PH3 valve closed
7/30/2010	3:55:38 AM	SiCl4 pre valve closed
7/30/2010	3:55:38 AM	SiCl4 post valve closed
7/30/2010	3:55:38 AM	Main Vac valve closed
7/30/2010	3:55:38 AM	Bypass valve closed
7/30/2010	3:55:38 AM	H2 valve opened
7/30/2010	3:55:38 AM	Bubbler valve opened
7/30/2010	3:55:38 AM	Helium MFC set to  0.000000
7/30/2010	3:55:38 AM	H2 MFC set to  500.000000
7/30/2010	3:55:38 AM	BCl3 MFC set to  0.000000
7/30/2010	3:55:38 AM	PHl3 MFC set to  0.000000
7/30/2010	3:55:38 AM	SiCl4 MFC set to  0.000000
7/30/2010	3:55:38 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:55:38 AM	Tube furnace set to 750
7/30/2010	4:15:38 AM	H2 valve closed
7/30/2010	4:15:38 AM	BCl3 valve closed
7/30/2010	4:15:38 AM	PH3 valve closed
7/30/2010	4:15:38 AM	SiCl4 pre valve closed
7/30/2010	4:15:38 AM	SiCl4 post valve closed
7/30/2010	4:15:38 AM	Main Vac valve closed
7/30/2010	4:15:38 AM	Bypass valve closed
7/30/2010	4:15:38 AM	Helium valve opened
7/30/2010	4:15:38 AM	Bubbler valve opened
7/30/2010	4:15:38 AM	Helium MFC set to  500.000000
7/30/2010	4:15:38 AM	H2 MFC set to  0.000000
7/30/2010	4:15:38 AM	BCl3 MFC set to  0.000000
7/30/2010	4:15:38 AM	PHl3 MFC set to  0.000000
7/30/2010	4:15:38 AM	SiCl4 MFC set to  0.000000
7/30/2010	4:15:38 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:15:38 AM	Tube furnace set to 0
7/30/2010	4:35:38 AM	Helium valve closed
7/30/2010	4:35:38 AM	H2 valve closed
7/30/2010	4:35:38 AM	BCl3 valve closed
7/30/2010	4:35:38 AM	PH3 valve closed
7/30/2010	4:35:38 AM	SiCl4 pre valve closed
7/30/2010	4:35:38 AM	SiCl4 post valve closed
7/30/2010	4:35:38 AM	Main Vac valve closed
7/30/2010	4:35:38 AM	Bypass valve closed
7/30/2010	4:35:38 AM	Bubbler valve closed
7/30/2010	4:35:38 AM	Helium MFC set to  0.000000
7/30/2010	4:35:38 AM	H2 MFC set to  0.000000
7/30/2010	4:35:38 AM	BCl3 MFC set to  0.000000
7/30/2010	4:35:38 AM	PHl3 MFC set to  0.000000
7/30/2010	4:35:38 AM	SiCl4 MFC set to  0.000000
7/30/2010	4:35:38 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:35:39 AM	Tube furnace set to 0
7/30/2010	4:35:39 AM	Run finished at 4:35 AM
7/30/2010	7:05:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	7:05:56 AM	Recipe started at 7:05 AM
7/30/2010	7:05:56 AM	Helium valve closed
7/30/2010	7:05:56 AM	H2 valve closed
7/30/2010	7:05:56 AM	BCl3 valve closed
7/30/2010	7:05:56 AM	PH3 valve closed
7/30/2010	7:05:56 AM	SiCl4 pre valve closed
7/30/2010	7:05:56 AM	SiCl4 post valve closed
7/30/2010	7:05:56 AM	Main Vac valve closed
7/30/2010	7:05:56 AM	Bubbler valve closed
7/30/2010	7:05:56 AM	Bypass valve opened
7/30/2010	7:05:56 AM	Helium MFC set to  0.000000
7/30/2010	7:05:56 AM	H2 MFC set to  0.000000
7/30/2010	7:05:56 AM	BCl3 MFC set to  0.000000
7/30/2010	7:05:56 AM	PHl3 MFC set to  0.000000
7/30/2010	7:05:56 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:05:56 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:05:56 AM	Tube furnace set to 0
7/30/2010	7:06:35 AM	Helium valve closed
7/30/2010	7:06:35 AM	H2 valve closed
7/30/2010	7:06:35 AM	BCl3 valve closed
7/30/2010	7:06:35 AM	PH3 valve closed
7/30/2010	7:06:35 AM	SiCl4 pre valve closed
7/30/2010	7:06:35 AM	SiCl4 post valve closed
7/30/2010	7:06:35 AM	Bubbler valve closed
7/30/2010	7:06:35 AM	Main Vac valve opened
7/30/2010	7:06:35 AM	Bypass valve opened
7/30/2010	7:06:35 AM	Helium MFC set to  0.000000
7/30/2010	7:06:35 AM	H2 MFC set to  0.000000
7/30/2010	7:06:35 AM	BCl3 MFC set to  0.000000
7/30/2010	7:06:35 AM	PHl3 MFC set to  0.000000
7/30/2010	7:06:35 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:06:35 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:06:35 AM	Tube furnace set to 0
7/30/2010	7:07:35 AM	H2 valve closed
7/30/2010	7:07:35 AM	BCl3 valve closed
7/30/2010	7:07:35 AM	PH3 valve closed
7/30/2010	7:07:35 AM	SiCl4 pre valve closed
7/30/2010	7:07:35 AM	SiCl4 post valve closed
7/30/2010	7:07:35 AM	Bubbler valve closed
7/30/2010	7:07:35 AM	Helium valve opened
7/30/2010	7:07:35 AM	Main Vac valve opened
7/30/2010	7:07:35 AM	Bypass valve opened
7/30/2010	7:07:35 AM	Helium MFC set to  100.000000
7/30/2010	7:07:35 AM	H2 MFC set to  0.000000
7/30/2010	7:07:35 AM	BCl3 MFC set to  0.000000
7/30/2010	7:07:35 AM	PHl3 MFC set to  0.000000
7/30/2010	7:07:35 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:07:35 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:07:35 AM	Tube furnace set to 0
7/30/2010	7:16:35 AM	Helium valve closed
7/30/2010	7:16:35 AM	H2 valve closed
7/30/2010	7:16:35 AM	BCl3 valve closed
7/30/2010	7:16:35 AM	PH3 valve closed
7/30/2010	7:16:35 AM	SiCl4 pre valve closed
7/30/2010	7:16:35 AM	SiCl4 post valve closed
7/30/2010	7:16:35 AM	Bubbler valve closed
7/30/2010	7:16:35 AM	Main Vac valve opened
7/30/2010	7:16:35 AM	Bypass valve opened
7/30/2010	7:16:35 AM	Helium MFC set to  0.000000
7/30/2010	7:16:35 AM	H2 MFC set to  0.000000
7/30/2010	7:16:35 AM	BCl3 MFC set to  0.000000
7/30/2010	7:16:35 AM	PHl3 MFC set to  0.000000
7/30/2010	7:16:35 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:16:35 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:16:35 AM	Tube furnace set to 0
7/30/2010	7:17:02 AM	Run aborted at 7:17 AM
7/30/2010	7:17:02 AM	Helium valve closed
7/30/2010	7:17:02 AM	H2 valve closed
7/30/2010	7:17:02 AM	BCl3 valve closed
7/30/2010	7:17:02 AM	PH3 valve closed
7/30/2010	7:17:02 AM	SiCl4 pre valve closed
7/30/2010	7:17:02 AM	SiCl4 post valve closed
7/30/2010	7:17:02 AM	Bypass valve closed
7/30/2010	7:17:02 AM	Main Vac valve closed
7/30/2010	7:17:02 AM	Bubbler valve closed
7/30/2010	7:17:02 AM	Helium MFC set to  0.000000
7/30/2010	7:17:02 AM	H2 MFC set to  0.000000
7/30/2010	7:17:02 AM	BCl3 MFC set to  0.000000
7/30/2010	7:17:02 AM	PHl3 MFC set to  0.000000
7/30/2010	7:17:02 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:17:02 AM	Tube furnace set to 0
7/30/2010	7:17:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	7:17:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	7:17:07 AM	Recipe started at 7:17 AM
7/30/2010	7:17:07 AM	Helium valve closed
7/30/2010	7:17:07 AM	H2 valve closed
7/30/2010	7:17:07 AM	BCl3 valve closed
7/30/2010	7:17:07 AM	PH3 valve closed
7/30/2010	7:17:07 AM	SiCl4 pre valve closed
7/30/2010	7:17:07 AM	SiCl4 post valve closed
7/30/2010	7:17:07 AM	Main Vac valve closed
7/30/2010	7:17:07 AM	Bubbler valve closed
7/30/2010	7:17:07 AM	Bypass valve opened
7/30/2010	7:17:07 AM	Helium MFC set to  0.000000
7/30/2010	7:17:07 AM	H2 MFC set to  0.000000
7/30/2010	7:17:07 AM	BCl3 MFC set to  0.000000
7/30/2010	7:17:07 AM	PHl3 MFC set to  0.000000
7/30/2010	7:17:07 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:17:07 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:17:07 AM	Tube furnace set to 0
7/30/2010	7:17:08 AM	Helium valve closed
7/30/2010	7:17:08 AM	H2 valve closed
7/30/2010	7:17:08 AM	BCl3 valve closed
7/30/2010	7:17:08 AM	PH3 valve closed
7/30/2010	7:17:08 AM	SiCl4 pre valve closed
7/30/2010	7:17:08 AM	SiCl4 post valve closed
7/30/2010	7:17:08 AM	Bubbler valve closed
7/30/2010	7:17:08 AM	Main Vac valve opened
7/30/2010	7:17:08 AM	Bypass valve opened
7/30/2010	7:17:08 AM	Helium MFC set to  0.000000
7/30/2010	7:17:08 AM	H2 MFC set to  0.000000
7/30/2010	7:17:08 AM	BCl3 MFC set to  0.000000
7/30/2010	7:17:08 AM	PHl3 MFC set to  0.000000
7/30/2010	7:17:08 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:17:08 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:17:08 AM	Tube furnace set to 0
7/30/2010	7:18:08 AM	H2 valve closed
7/30/2010	7:18:08 AM	BCl3 valve closed
7/30/2010	7:18:08 AM	PH3 valve closed
7/30/2010	7:18:08 AM	SiCl4 pre valve closed
7/30/2010	7:18:08 AM	SiCl4 post valve closed
7/30/2010	7:18:08 AM	Bubbler valve closed
7/30/2010	7:18:08 AM	Helium valve opened
7/30/2010	7:18:08 AM	Main Vac valve opened
7/30/2010	7:18:08 AM	Bypass valve opened
7/30/2010	7:18:08 AM	Helium MFC set to  100.000000
7/30/2010	7:18:08 AM	H2 MFC set to  0.000000
7/30/2010	7:18:08 AM	BCl3 MFC set to  0.000000
7/30/2010	7:18:08 AM	PHl3 MFC set to  0.000000
7/30/2010	7:18:08 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:18:08 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:18:08 AM	Tube furnace set to 0
7/30/2010	7:27:08 AM	Helium valve closed
7/30/2010	7:27:08 AM	H2 valve closed
7/30/2010	7:27:08 AM	BCl3 valve closed
7/30/2010	7:27:08 AM	PH3 valve closed
7/30/2010	7:27:08 AM	SiCl4 pre valve closed
7/30/2010	7:27:08 AM	SiCl4 post valve closed
7/30/2010	7:27:08 AM	Bubbler valve closed
7/30/2010	7:27:08 AM	Main Vac valve opened
7/30/2010	7:27:08 AM	Bypass valve opened
7/30/2010	7:27:08 AM	Helium MFC set to  0.000000
7/30/2010	7:27:08 AM	H2 MFC set to  0.000000
7/30/2010	7:27:08 AM	BCl3 MFC set to  0.000000
7/30/2010	7:27:08 AM	PHl3 MFC set to  0.000000
7/30/2010	7:27:08 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:27:08 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:27:08 AM	Tube furnace set to 0
7/30/2010	7:28:08 AM	H2 valve closed
7/30/2010	7:28:08 AM	BCl3 valve closed
7/30/2010	7:28:08 AM	PH3 valve closed
7/30/2010	7:28:08 AM	SiCl4 pre valve closed
7/30/2010	7:28:08 AM	SiCl4 post valve closed
7/30/2010	7:28:08 AM	Bubbler valve closed
7/30/2010	7:28:08 AM	Helium valve opened
7/30/2010	7:28:08 AM	Main Vac valve opened
7/30/2010	7:28:08 AM	Bypass valve opened
7/30/2010	7:28:08 AM	Helium MFC set to  100.000000
7/30/2010	7:28:08 AM	H2 MFC set to  0.000000
7/30/2010	7:28:08 AM	BCl3 MFC set to  0.000000
7/30/2010	7:28:08 AM	PHl3 MFC set to  0.000000
7/30/2010	7:28:08 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:28:08 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:28:08 AM	Tube furnace set to 0
7/30/2010	7:37:08 AM	Helium valve closed
7/30/2010	7:37:08 AM	H2 valve closed
7/30/2010	7:37:08 AM	BCl3 valve closed
7/30/2010	7:37:08 AM	PH3 valve closed
7/30/2010	7:37:08 AM	SiCl4 pre valve closed
7/30/2010	7:37:08 AM	SiCl4 post valve closed
7/30/2010	7:37:08 AM	Bubbler valve closed
7/30/2010	7:37:08 AM	Main Vac valve opened
7/30/2010	7:37:08 AM	Bypass valve opened
7/30/2010	7:37:08 AM	Helium MFC set to  0.000000
7/30/2010	7:37:08 AM	H2 MFC set to  0.000000
7/30/2010	7:37:08 AM	BCl3 MFC set to  0.000000
7/30/2010	7:37:08 AM	PHl3 MFC set to  0.000000
7/30/2010	7:37:08 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:37:08 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:37:09 AM	Tube furnace set to 0
7/30/2010	7:38:09 AM	H2 valve closed
7/30/2010	7:38:09 AM	BCl3 valve closed
7/30/2010	7:38:09 AM	PH3 valve closed
7/30/2010	7:38:09 AM	SiCl4 pre valve closed
7/30/2010	7:38:09 AM	SiCl4 post valve closed
7/30/2010	7:38:09 AM	Bubbler valve closed
7/30/2010	7:38:09 AM	Helium valve opened
7/30/2010	7:38:09 AM	Main Vac valve opened
7/30/2010	7:38:09 AM	Bypass valve opened
7/30/2010	7:38:09 AM	Helium MFC set to  100.000000
7/30/2010	7:38:09 AM	H2 MFC set to  0.000000
7/30/2010	7:38:09 AM	BCl3 MFC set to  0.000000
7/30/2010	7:38:09 AM	PHl3 MFC set to  0.000000
7/30/2010	7:38:09 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:38:09 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:38:09 AM	Tube furnace set to 0
7/30/2010	7:47:09 AM	Helium valve closed
7/30/2010	7:47:09 AM	H2 valve closed
7/30/2010	7:47:09 AM	BCl3 valve closed
7/30/2010	7:47:09 AM	PH3 valve closed
7/30/2010	7:47:09 AM	SiCl4 pre valve closed
7/30/2010	7:47:09 AM	SiCl4 post valve closed
7/30/2010	7:47:09 AM	Bubbler valve closed
7/30/2010	7:47:09 AM	Main Vac valve opened
7/30/2010	7:47:09 AM	Bypass valve opened
7/30/2010	7:47:09 AM	Helium MFC set to  0.000000
7/30/2010	7:47:09 AM	H2 MFC set to  0.000000
7/30/2010	7:47:09 AM	BCl3 MFC set to  0.000000
7/30/2010	7:47:09 AM	PHl3 MFC set to  0.000000
7/30/2010	7:47:09 AM	SiCl4 MFC set to  0.000000
7/30/2010	7:47:09 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:47:09 AM	Tube furnace set to 0
7/30/2010	7:47:10 AM	Run finished at 7:47 AM
7/30/2010	7:47:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	8:11:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	8:11:44 AM	Recipe started at 8:11 AM
7/30/2010	8:11:44 AM	Helium valve closed
7/30/2010	8:11:44 AM	H2 valve closed
7/30/2010	8:11:44 AM	BCl3 valve closed
7/30/2010	8:11:44 AM	PH3 valve closed
7/30/2010	8:11:44 AM	SiCl4 pre valve closed
7/30/2010	8:11:44 AM	SiCl4 post valve closed
7/30/2010	8:11:44 AM	Main Vac valve closed
7/30/2010	8:11:44 AM	Bubbler valve closed
7/30/2010	8:11:44 AM	Bypass valve opened
7/30/2010	8:11:44 AM	Helium MFC set to  0.000000
7/30/2010	8:11:44 AM	H2 MFC set to  0.000000
7/30/2010	8:11:44 AM	BCl3 MFC set to  0.000000
7/30/2010	8:11:44 AM	PHl3 MFC set to  0.000000
7/30/2010	8:11:44 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:11:44 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:11:44 AM	Tube furnace set to 0
7/30/2010	8:11:44 AM	Helium valve closed
7/30/2010	8:11:44 AM	H2 valve closed
7/30/2010	8:11:44 AM	BCl3 valve closed
7/30/2010	8:11:44 AM	PH3 valve closed
7/30/2010	8:11:44 AM	SiCl4 pre valve closed
7/30/2010	8:11:44 AM	SiCl4 post valve closed
7/30/2010	8:11:44 AM	Bubbler valve closed
7/30/2010	8:11:44 AM	Main Vac valve opened
7/30/2010	8:11:44 AM	Bypass valve opened
7/30/2010	8:11:44 AM	Helium MFC set to  0.000000
7/30/2010	8:11:44 AM	H2 MFC set to  0.000000
7/30/2010	8:11:44 AM	BCl3 MFC set to  0.000000
7/30/2010	8:11:44 AM	PHl3 MFC set to  0.000000
7/30/2010	8:11:44 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:11:44 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:11:44 AM	Tube furnace set to 0
7/30/2010	8:12:44 AM	H2 valve closed
7/30/2010	8:12:44 AM	BCl3 valve closed
7/30/2010	8:12:44 AM	PH3 valve closed
7/30/2010	8:12:44 AM	SiCl4 pre valve closed
7/30/2010	8:12:44 AM	SiCl4 post valve closed
7/30/2010	8:12:44 AM	Bubbler valve closed
7/30/2010	8:12:44 AM	Helium valve opened
7/30/2010	8:12:44 AM	Main Vac valve opened
7/30/2010	8:12:44 AM	Bypass valve opened
7/30/2010	8:12:44 AM	Helium MFC set to  100.000000
7/30/2010	8:12:44 AM	H2 MFC set to  0.000000
7/30/2010	8:12:44 AM	BCl3 MFC set to  0.000000
7/30/2010	8:12:44 AM	PHl3 MFC set to  0.000000
7/30/2010	8:12:44 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:12:44 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:12:44 AM	Tube furnace set to 0
7/30/2010	8:21:44 AM	Helium valve closed
7/30/2010	8:21:44 AM	H2 valve closed
7/30/2010	8:21:44 AM	BCl3 valve closed
7/30/2010	8:21:44 AM	PH3 valve closed
7/30/2010	8:21:44 AM	SiCl4 pre valve closed
7/30/2010	8:21:44 AM	SiCl4 post valve closed
7/30/2010	8:21:44 AM	Bubbler valve closed
7/30/2010	8:21:44 AM	Main Vac valve opened
7/30/2010	8:21:44 AM	Bypass valve opened
7/30/2010	8:21:44 AM	Helium MFC set to  0.000000
7/30/2010	8:21:44 AM	H2 MFC set to  0.000000
7/30/2010	8:21:44 AM	BCl3 MFC set to  0.000000
7/30/2010	8:21:44 AM	PHl3 MFC set to  0.000000
7/30/2010	8:21:44 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:21:44 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:21:45 AM	Tube furnace set to 0
7/30/2010	8:22:45 AM	H2 valve closed
7/30/2010	8:22:45 AM	BCl3 valve closed
7/30/2010	8:22:45 AM	PH3 valve closed
7/30/2010	8:22:45 AM	SiCl4 pre valve closed
7/30/2010	8:22:45 AM	SiCl4 post valve closed
7/30/2010	8:22:45 AM	Bubbler valve closed
7/30/2010	8:22:45 AM	Helium valve opened
7/30/2010	8:22:45 AM	Main Vac valve opened
7/30/2010	8:22:45 AM	Bypass valve opened
7/30/2010	8:22:45 AM	Helium MFC set to  100.000000
7/30/2010	8:22:45 AM	H2 MFC set to  0.000000
7/30/2010	8:22:45 AM	BCl3 MFC set to  0.000000
7/30/2010	8:22:45 AM	PHl3 MFC set to  0.000000
7/30/2010	8:22:45 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:22:45 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:22:45 AM	Tube furnace set to 0
7/30/2010	8:31:45 AM	Helium valve closed
7/30/2010	8:31:45 AM	H2 valve closed
7/30/2010	8:31:45 AM	BCl3 valve closed
7/30/2010	8:31:45 AM	PH3 valve closed
7/30/2010	8:31:45 AM	SiCl4 pre valve closed
7/30/2010	8:31:45 AM	SiCl4 post valve closed
7/30/2010	8:31:45 AM	Bubbler valve closed
7/30/2010	8:31:45 AM	Main Vac valve opened
7/30/2010	8:31:45 AM	Bypass valve opened
7/30/2010	8:31:45 AM	Helium MFC set to  0.000000
7/30/2010	8:31:45 AM	H2 MFC set to  0.000000
7/30/2010	8:31:45 AM	BCl3 MFC set to  0.000000
7/30/2010	8:31:45 AM	PHl3 MFC set to  0.000000
7/30/2010	8:31:45 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:31:45 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:31:45 AM	Tube furnace set to 0
7/30/2010	8:32:45 AM	H2 valve closed
7/30/2010	8:32:45 AM	BCl3 valve closed
7/30/2010	8:32:45 AM	PH3 valve closed
7/30/2010	8:32:45 AM	SiCl4 pre valve closed
7/30/2010	8:32:45 AM	SiCl4 post valve closed
7/30/2010	8:32:45 AM	Bubbler valve closed
7/30/2010	8:32:45 AM	Helium valve opened
7/30/2010	8:32:45 AM	Main Vac valve opened
7/30/2010	8:32:45 AM	Bypass valve opened
7/30/2010	8:32:45 AM	Helium MFC set to  100.000000
7/30/2010	8:32:45 AM	H2 MFC set to  0.000000
7/30/2010	8:32:45 AM	BCl3 MFC set to  0.000000
7/30/2010	8:32:45 AM	PHl3 MFC set to  0.000000
7/30/2010	8:32:45 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:32:45 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:32:45 AM	Tube furnace set to 0
7/30/2010	8:41:45 AM	Helium valve closed
7/30/2010	8:41:45 AM	H2 valve closed
7/30/2010	8:41:45 AM	BCl3 valve closed
7/30/2010	8:41:45 AM	PH3 valve closed
7/30/2010	8:41:45 AM	SiCl4 pre valve closed
7/30/2010	8:41:45 AM	SiCl4 post valve closed
7/30/2010	8:41:45 AM	Bubbler valve closed
7/30/2010	8:41:45 AM	Main Vac valve opened
7/30/2010	8:41:45 AM	Bypass valve opened
7/30/2010	8:41:45 AM	Helium MFC set to  0.000000
7/30/2010	8:41:45 AM	H2 MFC set to  0.000000
7/30/2010	8:41:45 AM	BCl3 MFC set to  0.000000
7/30/2010	8:41:45 AM	PHl3 MFC set to  0.000000
7/30/2010	8:41:45 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:41:45 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:41:45 AM	Tube furnace set to 0
7/30/2010	8:41:46 AM	Run finished at 8:41 AM
7/30/2010	8:41:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	8:47:45 AM	Helium MFC set to  100.000000
7/30/2010	8:47:46 AM	Helium valve opened
7/30/2010	8:50:58 AM	Helium MFC set to  100.000000
7/30/2010	8:51:27 AM	Helium valve closed
7/30/2010	8:51:29 AM	Helium MFC set to  0.000000
7/30/2010	8:52:15 AM	Recipe started at 8:52 AM
7/30/2010	8:52:15 AM	Helium valve closed
7/30/2010	8:52:15 AM	BCl3 valve closed
7/30/2010	8:52:15 AM	PH3 valve closed
7/30/2010	8:52:15 AM	SiCl4 pre valve closed
7/30/2010	8:52:15 AM	SiCl4 post valve closed
7/30/2010	8:52:15 AM	Main Vac valve closed
7/30/2010	8:52:15 AM	Bypass valve closed
7/30/2010	8:52:15 AM	Bubbler valve closed
7/30/2010	8:52:15 AM	H2 valve opened
7/30/2010	8:52:15 AM	Helium MFC set to  0.000000
7/30/2010	8:52:15 AM	H2 MFC set to  500.000000
7/30/2010	8:52:15 AM	BCl3 MFC set to  0.000000
7/30/2010	8:52:15 AM	PHl3 MFC set to  0.000000
7/30/2010	8:52:15 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:52:15 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:52:15 AM	Tube furnace set to 1000
7/30/2010	8:53:36 AM	Helium valve closed
7/30/2010	8:53:36 AM	BCl3 valve closed
7/30/2010	8:53:36 AM	PH3 valve closed
7/30/2010	8:53:36 AM	SiCl4 pre valve closed
7/30/2010	8:53:36 AM	SiCl4 post valve closed
7/30/2010	8:53:36 AM	Main Vac valve closed
7/30/2010	8:53:36 AM	Bypass valve closed
7/30/2010	8:53:36 AM	H2 valve opened
7/30/2010	8:53:36 AM	Bubbler valve opened
7/30/2010	8:53:36 AM	Helium MFC set to  0.000000
7/30/2010	8:53:36 AM	H2 MFC set to  500.000000
7/30/2010	8:53:36 AM	BCl3 MFC set to  0.000000
7/30/2010	8:53:36 AM	PHl3 MFC set to  0.000000
7/30/2010	8:53:36 AM	SiCl4 MFC set to  0.000000
7/30/2010	8:53:36 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:53:36 AM	Tube furnace set to 1000
7/30/2010	9:13:36 AM	Helium valve closed
7/30/2010	9:13:36 AM	PH3 valve closed
7/30/2010	9:13:36 AM	Main Vac valve closed
7/30/2010	9:13:36 AM	Bypass valve closed
7/30/2010	9:13:36 AM	H2 valve opened
7/30/2010	9:13:36 AM	BCl3 valve opened
7/30/2010	9:13:36 AM	SiCl4 pre valve opened
7/30/2010	9:13:36 AM	SiCl4 post valve opened
7/30/2010	9:13:36 AM	Bubbler valve opened
7/30/2010	9:13:36 AM	Helium MFC set to  0.000000
7/30/2010	9:13:36 AM	H2 MFC set to  500.000000
7/30/2010	9:13:36 AM	BCl3 MFC set to  35.000000
7/30/2010	9:13:36 AM	PHl3 MFC set to  0.000000
7/30/2010	9:13:36 AM	SiCl4 MFC set to  50.000000
7/30/2010	9:13:36 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	9:13:37 AM	Tube furnace set to 1000
7/30/2010	9:23:37 AM	Helium valve closed
7/30/2010	9:23:37 AM	BCl3 valve closed
7/30/2010	9:23:37 AM	PH3 valve closed
7/30/2010	9:23:37 AM	SiCl4 pre valve closed
7/30/2010	9:23:37 AM	SiCl4 post valve closed
7/30/2010	9:23:37 AM	Main Vac valve closed
7/30/2010	9:23:37 AM	Bypass valve closed
7/30/2010	9:23:37 AM	H2 valve opened
7/30/2010	9:23:37 AM	Bubbler valve opened
7/30/2010	9:23:37 AM	Helium MFC set to  0.000000
7/30/2010	9:23:37 AM	H2 MFC set to  500.000000
7/30/2010	9:23:37 AM	BCl3 MFC set to  0.000000
7/30/2010	9:23:37 AM	PHl3 MFC set to  0.000000
7/30/2010	9:23:37 AM	SiCl4 MFC set to  0.000000
7/30/2010	9:23:37 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	9:23:37 AM	Tube furnace set to 750
7/30/2010	9:43:37 AM	H2 valve closed
7/30/2010	9:43:37 AM	BCl3 valve closed
7/30/2010	9:43:37 AM	PH3 valve closed
7/30/2010	9:43:37 AM	SiCl4 pre valve closed
7/30/2010	9:43:37 AM	SiCl4 post valve closed
7/30/2010	9:43:37 AM	Main Vac valve closed
7/30/2010	9:43:37 AM	Bypass valve closed
7/30/2010	9:43:37 AM	Helium valve opened
7/30/2010	9:43:37 AM	Bubbler valve opened
7/30/2010	9:43:37 AM	Helium MFC set to  500.000000
7/30/2010	9:43:37 AM	H2 MFC set to  0.000000
7/30/2010	9:43:37 AM	BCl3 MFC set to  0.000000
7/30/2010	9:43:37 AM	PHl3 MFC set to  0.000000
7/30/2010	9:43:37 AM	SiCl4 MFC set to  0.000000
7/30/2010	9:43:37 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	9:43:37 AM	Tube furnace set to 0
7/30/2010	10:03:37 AM	Helium valve closed
7/30/2010	10:03:37 AM	H2 valve closed
7/30/2010	10:03:37 AM	BCl3 valve closed
7/30/2010	10:03:37 AM	PH3 valve closed
7/30/2010	10:03:37 AM	SiCl4 pre valve closed
7/30/2010	10:03:37 AM	SiCl4 post valve closed
7/30/2010	10:03:37 AM	Main Vac valve closed
7/30/2010	10:03:37 AM	Bypass valve closed
7/30/2010	10:03:37 AM	Bubbler valve closed
7/30/2010	10:03:37 AM	Helium MFC set to  0.000000
7/30/2010	10:03:37 AM	H2 MFC set to  0.000000
7/30/2010	10:03:37 AM	BCl3 MFC set to  0.000000
7/30/2010	10:03:37 AM	PHl3 MFC set to  0.000000
7/30/2010	10:03:37 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:03:37 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:03:37 AM	Tube furnace set to 0
7/30/2010	10:03:37 AM	Run finished at 10:03 AM
7/30/2010	10:13:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	10:13:51 AM	Recipe started at 10:13 AM
7/30/2010	10:13:52 AM	H2 valve closed
7/30/2010	10:13:52 AM	BCl3 valve closed
7/30/2010	10:13:52 AM	PH3 valve closed
7/30/2010	10:13:52 AM	SiCl4 pre valve closed
7/30/2010	10:13:52 AM	SiCl4 post valve closed
7/30/2010	10:13:52 AM	Main Vac valve closed
7/30/2010	10:13:52 AM	Bypass valve closed
7/30/2010	10:13:52 AM	Bubbler valve closed
7/30/2010	10:13:52 AM	Helium valve opened
7/30/2010	10:13:52 AM	Helium MFC set to  500.000000
7/30/2010	10:13:52 AM	H2 MFC set to  0.000000
7/30/2010	10:13:52 AM	BCl3 MFC set to  0.000000
7/30/2010	10:13:52 AM	PHl3 MFC set to  0.000000
7/30/2010	10:13:52 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:13:52 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:13:52 AM	Tube furnace set to 0
7/30/2010	10:13:56 AM	Helium valve closed
7/30/2010	10:13:56 AM	H2 valve closed
7/30/2010	10:13:56 AM	BCl3 valve closed
7/30/2010	10:13:56 AM	PH3 valve closed
7/30/2010	10:13:56 AM	SiCl4 pre valve closed
7/30/2010	10:13:56 AM	SiCl4 post valve closed
7/30/2010	10:13:56 AM	Main Vac valve closed
7/30/2010	10:13:56 AM	Bypass valve closed
7/30/2010	10:13:56 AM	Bubbler valve closed
7/30/2010	10:13:56 AM	Helium MFC set to  0.000000
7/30/2010	10:13:56 AM	H2 MFC set to  0.000000
7/30/2010	10:13:56 AM	BCl3 MFC set to  0.000000
7/30/2010	10:13:56 AM	PHl3 MFC set to  0.000000
7/30/2010	10:13:56 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:13:56 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:13:56 AM	Tube furnace set to 0
7/30/2010	10:13:57 AM	Run finished at 10:13 AM
7/30/2010	10:13:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	10:24:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	10:24:46 AM	Recipe started at 10:24 AM
7/30/2010	10:24:46 AM	Helium valve closed
7/30/2010	10:24:46 AM	H2 valve closed
7/30/2010	10:24:46 AM	BCl3 valve closed
7/30/2010	10:24:46 AM	PH3 valve closed
7/30/2010	10:24:46 AM	SiCl4 pre valve closed
7/30/2010	10:24:46 AM	SiCl4 post valve closed
7/30/2010	10:24:46 AM	Main Vac valve closed
7/30/2010	10:24:46 AM	Bubbler valve closed
7/30/2010	10:24:46 AM	Bypass valve opened
7/30/2010	10:24:46 AM	Helium MFC set to  0.000000
7/30/2010	10:24:46 AM	H2 MFC set to  0.000000
7/30/2010	10:24:46 AM	BCl3 MFC set to  0.000000
7/30/2010	10:24:46 AM	PHl3 MFC set to  0.000000
7/30/2010	10:24:46 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:24:46 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:24:46 AM	Tube furnace set to 0
7/30/2010	10:26:11 AM	Run aborted at 10:26 AM
7/30/2010	10:26:11 AM	Helium valve closed
7/30/2010	10:26:11 AM	H2 valve closed
7/30/2010	10:26:11 AM	BCl3 valve closed
7/30/2010	10:26:11 AM	PH3 valve closed
7/30/2010	10:26:11 AM	SiCl4 pre valve closed
7/30/2010	10:26:11 AM	SiCl4 post valve closed
7/30/2010	10:26:11 AM	Bypass valve closed
7/30/2010	10:26:11 AM	Main Vac valve closed
7/30/2010	10:26:11 AM	Bubbler valve closed
7/30/2010	10:26:11 AM	Helium MFC set to  0.000000
7/30/2010	10:26:11 AM	H2 MFC set to  0.000000
7/30/2010	10:26:11 AM	BCl3 MFC set to  0.000000
7/30/2010	10:26:11 AM	PHl3 MFC set to  0.000000
7/30/2010	10:26:11 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:26:11 AM	Tube furnace set to 0
7/30/2010	10:26:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	10:30:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	10:30:31 AM	Recipe started at 10:30 AM
7/30/2010	10:30:31 AM	Helium valve closed
7/30/2010	10:30:31 AM	H2 valve closed
7/30/2010	10:30:31 AM	BCl3 valve closed
7/30/2010	10:30:31 AM	PH3 valve closed
7/30/2010	10:30:31 AM	SiCl4 pre valve closed
7/30/2010	10:30:31 AM	SiCl4 post valve closed
7/30/2010	10:30:31 AM	Main Vac valve closed
7/30/2010	10:30:31 AM	Bubbler valve closed
7/30/2010	10:30:31 AM	Bypass valve opened
7/30/2010	10:30:31 AM	Helium MFC set to  0.000000
7/30/2010	10:30:31 AM	H2 MFC set to  0.000000
7/30/2010	10:30:31 AM	BCl3 MFC set to  0.000000
7/30/2010	10:30:31 AM	PHl3 MFC set to  0.000000
7/30/2010	10:30:31 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:30:31 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:30:31 AM	Tube furnace set to 0
7/30/2010	10:31:37 AM	Helium valve closed
7/30/2010	10:31:37 AM	H2 valve closed
7/30/2010	10:31:37 AM	BCl3 valve closed
7/30/2010	10:31:37 AM	PH3 valve closed
7/30/2010	10:31:37 AM	SiCl4 pre valve closed
7/30/2010	10:31:37 AM	SiCl4 post valve closed
7/30/2010	10:31:37 AM	Bubbler valve closed
7/30/2010	10:31:37 AM	Main Vac valve opened
7/30/2010	10:31:37 AM	Bypass valve opened
7/30/2010	10:31:37 AM	Helium MFC set to  0.000000
7/30/2010	10:31:37 AM	H2 MFC set to  0.000000
7/30/2010	10:31:37 AM	BCl3 MFC set to  0.000000
7/30/2010	10:31:37 AM	PHl3 MFC set to  0.000000
7/30/2010	10:31:37 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:31:37 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:31:37 AM	Tube furnace set to 0
7/30/2010	10:31:37 AM	Run finished at 10:31 AM
7/30/2010	10:31:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	10:31:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	10:31:53 AM	Recipe started at 10:31 AM
7/30/2010	10:31:53 AM	Helium valve closed
7/30/2010	10:31:53 AM	H2 valve closed
7/30/2010	10:31:53 AM	BCl3 valve closed
7/30/2010	10:31:53 AM	PH3 valve closed
7/30/2010	10:31:53 AM	SiCl4 pre valve closed
7/30/2010	10:31:53 AM	SiCl4 post valve closed
7/30/2010	10:31:53 AM	Main Vac valve closed
7/30/2010	10:31:53 AM	Bubbler valve closed
7/30/2010	10:31:53 AM	Bypass valve opened
7/30/2010	10:31:53 AM	Helium MFC set to  0.000000
7/30/2010	10:31:53 AM	H2 MFC set to  0.000000
7/30/2010	10:31:53 AM	BCl3 MFC set to  0.000000
7/30/2010	10:31:53 AM	PHl3 MFC set to  0.000000
7/30/2010	10:31:53 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:31:53 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:31:53 AM	Tube furnace set to 0
7/30/2010	10:31:54 AM	Helium valve closed
7/30/2010	10:31:54 AM	H2 valve closed
7/30/2010	10:31:54 AM	BCl3 valve closed
7/30/2010	10:31:54 AM	PH3 valve closed
7/30/2010	10:31:54 AM	SiCl4 pre valve closed
7/30/2010	10:31:54 AM	SiCl4 post valve closed
7/30/2010	10:31:54 AM	Bubbler valve closed
7/30/2010	10:31:54 AM	Main Vac valve opened
7/30/2010	10:31:54 AM	Bypass valve opened
7/30/2010	10:31:54 AM	Helium MFC set to  0.000000
7/30/2010	10:31:54 AM	H2 MFC set to  0.000000
7/30/2010	10:31:54 AM	BCl3 MFC set to  0.000000
7/30/2010	10:31:54 AM	PHl3 MFC set to  0.000000
7/30/2010	10:31:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:31:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:31:54 AM	Tube furnace set to 0
7/30/2010	10:32:54 AM	H2 valve closed
7/30/2010	10:32:54 AM	BCl3 valve closed
7/30/2010	10:32:54 AM	PH3 valve closed
7/30/2010	10:32:54 AM	SiCl4 pre valve closed
7/30/2010	10:32:54 AM	SiCl4 post valve closed
7/30/2010	10:32:54 AM	Bubbler valve closed
7/30/2010	10:32:54 AM	Helium valve opened
7/30/2010	10:32:54 AM	Main Vac valve opened
7/30/2010	10:32:54 AM	Bypass valve opened
7/30/2010	10:32:54 AM	Helium MFC set to  100.000000
7/30/2010	10:32:54 AM	H2 MFC set to  0.000000
7/30/2010	10:32:54 AM	BCl3 MFC set to  0.000000
7/30/2010	10:32:54 AM	PHl3 MFC set to  0.000000
7/30/2010	10:32:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:32:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:32:54 AM	Tube furnace set to 0
7/30/2010	10:41:54 AM	Helium valve closed
7/30/2010	10:41:54 AM	H2 valve closed
7/30/2010	10:41:54 AM	BCl3 valve closed
7/30/2010	10:41:54 AM	PH3 valve closed
7/30/2010	10:41:54 AM	SiCl4 pre valve closed
7/30/2010	10:41:54 AM	SiCl4 post valve closed
7/30/2010	10:41:54 AM	Bubbler valve closed
7/30/2010	10:41:54 AM	Main Vac valve opened
7/30/2010	10:41:54 AM	Bypass valve opened
7/30/2010	10:41:54 AM	Helium MFC set to  0.000000
7/30/2010	10:41:54 AM	H2 MFC set to  0.000000
7/30/2010	10:41:54 AM	BCl3 MFC set to  0.000000
7/30/2010	10:41:54 AM	PHl3 MFC set to  0.000000
7/30/2010	10:41:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:41:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:41:54 AM	Tube furnace set to 0
7/30/2010	10:42:54 AM	H2 valve closed
7/30/2010	10:42:54 AM	BCl3 valve closed
7/30/2010	10:42:54 AM	PH3 valve closed
7/30/2010	10:42:54 AM	SiCl4 pre valve closed
7/30/2010	10:42:54 AM	SiCl4 post valve closed
7/30/2010	10:42:54 AM	Bubbler valve closed
7/30/2010	10:42:54 AM	Helium valve opened
7/30/2010	10:42:54 AM	Main Vac valve opened
7/30/2010	10:42:54 AM	Bypass valve opened
7/30/2010	10:42:54 AM	Helium MFC set to  100.000000
7/30/2010	10:42:54 AM	H2 MFC set to  0.000000
7/30/2010	10:42:54 AM	BCl3 MFC set to  0.000000
7/30/2010	10:42:54 AM	PHl3 MFC set to  0.000000
7/30/2010	10:42:54 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:42:54 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:42:55 AM	Tube furnace set to 0
7/30/2010	10:51:55 AM	Helium valve closed
7/30/2010	10:51:55 AM	H2 valve closed
7/30/2010	10:51:55 AM	BCl3 valve closed
7/30/2010	10:51:55 AM	PH3 valve closed
7/30/2010	10:51:55 AM	SiCl4 pre valve closed
7/30/2010	10:51:55 AM	SiCl4 post valve closed
7/30/2010	10:51:55 AM	Bubbler valve closed
7/30/2010	10:51:55 AM	Main Vac valve opened
7/30/2010	10:51:55 AM	Bypass valve opened
7/30/2010	10:51:55 AM	Helium MFC set to  0.000000
7/30/2010	10:51:55 AM	H2 MFC set to  0.000000
7/30/2010	10:51:55 AM	BCl3 MFC set to  0.000000
7/30/2010	10:51:55 AM	PHl3 MFC set to  0.000000
7/30/2010	10:51:55 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:51:55 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:51:55 AM	Tube furnace set to 0
7/30/2010	10:52:55 AM	H2 valve closed
7/30/2010	10:52:55 AM	BCl3 valve closed
7/30/2010	10:52:55 AM	PH3 valve closed
7/30/2010	10:52:55 AM	SiCl4 pre valve closed
7/30/2010	10:52:55 AM	SiCl4 post valve closed
7/30/2010	10:52:55 AM	Bubbler valve closed
7/30/2010	10:52:55 AM	Helium valve opened
7/30/2010	10:52:55 AM	Main Vac valve opened
7/30/2010	10:52:55 AM	Bypass valve opened
7/30/2010	10:52:55 AM	Helium MFC set to  100.000000
7/30/2010	10:52:55 AM	H2 MFC set to  0.000000
7/30/2010	10:52:55 AM	BCl3 MFC set to  0.000000
7/30/2010	10:52:55 AM	PHl3 MFC set to  0.000000
7/30/2010	10:52:55 AM	SiCl4 MFC set to  0.000000
7/30/2010	10:52:55 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	10:52:55 AM	Tube furnace set to 0
7/30/2010	11:01:55 AM	Helium valve closed
7/30/2010	11:01:55 AM	H2 valve closed
7/30/2010	11:01:55 AM	BCl3 valve closed
7/30/2010	11:01:55 AM	PH3 valve closed
7/30/2010	11:01:55 AM	SiCl4 pre valve closed
7/30/2010	11:01:55 AM	SiCl4 post valve closed
7/30/2010	11:01:55 AM	Bubbler valve closed
7/30/2010	11:01:55 AM	Main Vac valve opened
7/30/2010	11:01:55 AM	Bypass valve opened
7/30/2010	11:01:55 AM	Helium MFC set to  0.000000
7/30/2010	11:01:55 AM	H2 MFC set to  0.000000
7/30/2010	11:01:55 AM	BCl3 MFC set to  0.000000
7/30/2010	11:01:55 AM	PHl3 MFC set to  0.000000
7/30/2010	11:01:55 AM	SiCl4 MFC set to  0.000000
7/30/2010	11:01:55 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	11:01:55 AM	Tube furnace set to 0
7/30/2010	11:01:56 AM	Run finished at 11:01 AM
7/30/2010	11:01:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	11:12:50 AM	Helium MFC set to  100.000000
7/30/2010	11:12:52 AM	Helium valve opened
7/30/2010	11:21:10 AM	Helium valve closed
7/30/2010	11:21:12 AM	Helium MFC set to  0.000000
7/30/2010	11:22:02 AM	Recipe started at 11:22 AM
7/30/2010	11:22:02 AM	Helium valve closed
7/30/2010	11:22:02 AM	BCl3 valve closed
7/30/2010	11:22:02 AM	PH3 valve closed
7/30/2010	11:22:02 AM	SiCl4 pre valve closed
7/30/2010	11:22:02 AM	SiCl4 post valve closed
7/30/2010	11:22:02 AM	Main Vac valve closed
7/30/2010	11:22:02 AM	Bypass valve closed
7/30/2010	11:22:02 AM	Bubbler valve closed
7/30/2010	11:22:02 AM	H2 valve opened
7/30/2010	11:22:02 AM	Helium MFC set to  0.000000
7/30/2010	11:22:02 AM	H2 MFC set to  500.000000
7/30/2010	11:22:02 AM	BCl3 MFC set to  0.000000
7/30/2010	11:22:02 AM	PHl3 MFC set to  0.000000
7/30/2010	11:22:02 AM	SiCl4 MFC set to  0.000000
7/30/2010	11:22:02 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	11:22:02 AM	Tube furnace set to 1000
7/30/2010	11:23:21 AM	Helium valve closed
7/30/2010	11:23:21 AM	BCl3 valve closed
7/30/2010	11:23:21 AM	PH3 valve closed
7/30/2010	11:23:21 AM	SiCl4 pre valve closed
7/30/2010	11:23:21 AM	SiCl4 post valve closed
7/30/2010	11:23:21 AM	Main Vac valve closed
7/30/2010	11:23:21 AM	Bypass valve closed
7/30/2010	11:23:21 AM	H2 valve opened
7/30/2010	11:23:21 AM	Bubbler valve opened
7/30/2010	11:23:21 AM	Helium MFC set to  0.000000
7/30/2010	11:23:21 AM	H2 MFC set to  500.000000
7/30/2010	11:23:21 AM	BCl3 MFC set to  0.000000
7/30/2010	11:23:21 AM	PHl3 MFC set to  0.000000
7/30/2010	11:23:21 AM	SiCl4 MFC set to  0.000000
7/30/2010	11:23:21 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	11:23:21 AM	Tube furnace set to 1000
7/30/2010	11:43:21 AM	Helium valve closed
7/30/2010	11:43:21 AM	PH3 valve closed
7/30/2010	11:43:21 AM	Main Vac valve closed
7/30/2010	11:43:21 AM	Bypass valve closed
7/30/2010	11:43:21 AM	H2 valve opened
7/30/2010	11:43:21 AM	BCl3 valve opened
7/30/2010	11:43:21 AM	SiCl4 pre valve opened
7/30/2010	11:43:21 AM	SiCl4 post valve opened
7/30/2010	11:43:21 AM	Bubbler valve opened
7/30/2010	11:43:21 AM	Helium MFC set to  0.000000
7/30/2010	11:43:21 AM	H2 MFC set to  500.000000
7/30/2010	11:43:21 AM	BCl3 MFC set to  35.000000
7/30/2010	11:43:21 AM	PHl3 MFC set to  0.000000
7/30/2010	11:43:21 AM	SiCl4 MFC set to  50.000000
7/30/2010	11:43:21 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	11:43:22 AM	Tube furnace set to 1000
7/30/2010	11:53:22 AM	Helium valve closed
7/30/2010	11:53:22 AM	BCl3 valve closed
7/30/2010	11:53:22 AM	PH3 valve closed
7/30/2010	11:53:22 AM	SiCl4 pre valve closed
7/30/2010	11:53:22 AM	SiCl4 post valve closed
7/30/2010	11:53:22 AM	Main Vac valve closed
7/30/2010	11:53:22 AM	Bypass valve closed
7/30/2010	11:53:22 AM	H2 valve opened
7/30/2010	11:53:22 AM	Bubbler valve opened
7/30/2010	11:53:22 AM	Helium MFC set to  0.000000
7/30/2010	11:53:22 AM	H2 MFC set to  500.000000
7/30/2010	11:53:22 AM	BCl3 MFC set to  0.000000
7/30/2010	11:53:22 AM	PHl3 MFC set to  0.000000
7/30/2010	11:53:22 AM	SiCl4 MFC set to  0.000000
7/30/2010	11:53:22 AM	Bypass solenoid MFC set to  0.000000
7/30/2010	11:53:22 AM	Tube furnace set to 750
7/30/2010	12:13:22 PM	H2 valve closed
7/30/2010	12:13:22 PM	BCl3 valve closed
7/30/2010	12:13:22 PM	PH3 valve closed
7/30/2010	12:13:22 PM	SiCl4 pre valve closed
7/30/2010	12:13:22 PM	SiCl4 post valve closed
7/30/2010	12:13:22 PM	Main Vac valve closed
7/30/2010	12:13:22 PM	Bypass valve closed
7/30/2010	12:13:22 PM	Helium valve opened
7/30/2010	12:13:22 PM	Bubbler valve opened
7/30/2010	12:13:22 PM	Helium MFC set to  500.000000
7/30/2010	12:13:22 PM	H2 MFC set to  0.000000
7/30/2010	12:13:22 PM	BCl3 MFC set to  0.000000
7/30/2010	12:13:22 PM	PHl3 MFC set to  0.000000
7/30/2010	12:13:22 PM	SiCl4 MFC set to  0.000000
7/30/2010	12:13:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:13:22 PM	Tube furnace set to 0
7/30/2010	12:33:22 PM	Helium valve closed
7/30/2010	12:33:22 PM	H2 valve closed
7/30/2010	12:33:22 PM	BCl3 valve closed
7/30/2010	12:33:22 PM	PH3 valve closed
7/30/2010	12:33:22 PM	SiCl4 pre valve closed
7/30/2010	12:33:22 PM	SiCl4 post valve closed
7/30/2010	12:33:22 PM	Main Vac valve closed
7/30/2010	12:33:22 PM	Bypass valve closed
7/30/2010	12:33:22 PM	Bubbler valve closed
7/30/2010	12:33:22 PM	Helium MFC set to  0.000000
7/30/2010	12:33:22 PM	H2 MFC set to  0.000000
7/30/2010	12:33:22 PM	BCl3 MFC set to  0.000000
7/30/2010	12:33:22 PM	PHl3 MFC set to  0.000000
7/30/2010	12:33:22 PM	SiCl4 MFC set to  0.000000
7/30/2010	12:33:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:33:22 PM	Tube furnace set to 0
7/30/2010	12:33:22 PM	Run finished at 12:33 PM
7/30/2010	12:49:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	12:49:43 PM	Recipe started at 12:49 PM
7/30/2010	12:49:43 PM	H2 valve closed
7/30/2010	12:49:43 PM	BCl3 valve closed
7/30/2010	12:49:43 PM	PH3 valve closed
7/30/2010	12:49:43 PM	SiCl4 pre valve closed
7/30/2010	12:49:43 PM	SiCl4 post valve closed
7/30/2010	12:49:43 PM	Main Vac valve closed
7/30/2010	12:49:43 PM	Bypass valve closed
7/30/2010	12:49:43 PM	Bubbler valve closed
7/30/2010	12:49:43 PM	Helium valve opened
7/30/2010	12:49:43 PM	Helium MFC set to  500.000000
7/30/2010	12:49:43 PM	H2 MFC set to  0.000000
7/30/2010	12:49:43 PM	BCl3 MFC set to  0.000000
7/30/2010	12:49:43 PM	PHl3 MFC set to  0.000000
7/30/2010	12:49:43 PM	SiCl4 MFC set to  0.000000
7/30/2010	12:49:43 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:49:43 PM	Tube furnace set to 0
7/30/2010	12:49:52 PM	Helium valve closed
7/30/2010	12:49:52 PM	H2 valve closed
7/30/2010	12:49:52 PM	BCl3 valve closed
7/30/2010	12:49:52 PM	PH3 valve closed
7/30/2010	12:49:52 PM	SiCl4 pre valve closed
7/30/2010	12:49:52 PM	SiCl4 post valve closed
7/30/2010	12:49:52 PM	Main Vac valve closed
7/30/2010	12:49:52 PM	Bypass valve closed
7/30/2010	12:49:52 PM	Bubbler valve closed
7/30/2010	12:49:52 PM	Helium MFC set to  0.000000
7/30/2010	12:49:52 PM	H2 MFC set to  0.000000
7/30/2010	12:49:52 PM	BCl3 MFC set to  0.000000
7/30/2010	12:49:52 PM	PHl3 MFC set to  0.000000
7/30/2010	12:49:52 PM	SiCl4 MFC set to  0.000000
7/30/2010	12:49:52 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	12:49:52 PM	Tube furnace set to 0
7/30/2010	12:49:52 PM	Run finished at 12:49 PM
7/30/2010	12:49:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	1:04:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	1:04:43 PM	Recipe started at 1:04 PM
7/30/2010	1:04:43 PM	Helium valve closed
7/30/2010	1:04:43 PM	H2 valve closed
7/30/2010	1:04:43 PM	BCl3 valve closed
7/30/2010	1:04:43 PM	PH3 valve closed
7/30/2010	1:04:43 PM	SiCl4 pre valve closed
7/30/2010	1:04:43 PM	SiCl4 post valve closed
7/30/2010	1:04:43 PM	Main Vac valve closed
7/30/2010	1:04:43 PM	Bubbler valve closed
7/30/2010	1:04:43 PM	Bypass valve opened
7/30/2010	1:04:43 PM	Helium MFC set to  0.000000
7/30/2010	1:04:43 PM	H2 MFC set to  0.000000
7/30/2010	1:04:43 PM	BCl3 MFC set to  0.000000
7/30/2010	1:04:43 PM	PHl3 MFC set to  0.000000
7/30/2010	1:04:43 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:04:43 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:04:43 PM	Tube furnace set to 0
7/30/2010	1:05:22 PM	Helium valve closed
7/30/2010	1:05:22 PM	H2 valve closed
7/30/2010	1:05:22 PM	BCl3 valve closed
7/30/2010	1:05:22 PM	PH3 valve closed
7/30/2010	1:05:22 PM	SiCl4 pre valve closed
7/30/2010	1:05:22 PM	SiCl4 post valve closed
7/30/2010	1:05:22 PM	Bubbler valve closed
7/30/2010	1:05:22 PM	Main Vac valve opened
7/30/2010	1:05:22 PM	Bypass valve opened
7/30/2010	1:05:22 PM	Helium MFC set to  0.000000
7/30/2010	1:05:22 PM	H2 MFC set to  0.000000
7/30/2010	1:05:22 PM	BCl3 MFC set to  0.000000
7/30/2010	1:05:22 PM	PHl3 MFC set to  0.000000
7/30/2010	1:05:22 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:05:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:05:22 PM	Tube furnace set to 0
7/30/2010	1:06:22 PM	H2 valve closed
7/30/2010	1:06:22 PM	BCl3 valve closed
7/30/2010	1:06:22 PM	PH3 valve closed
7/30/2010	1:06:22 PM	SiCl4 pre valve closed
7/30/2010	1:06:22 PM	SiCl4 post valve closed
7/30/2010	1:06:22 PM	Bubbler valve closed
7/30/2010	1:06:22 PM	Helium valve opened
7/30/2010	1:06:22 PM	Main Vac valve opened
7/30/2010	1:06:22 PM	Bypass valve opened
7/30/2010	1:06:22 PM	Helium MFC set to  100.000000
7/30/2010	1:06:22 PM	H2 MFC set to  0.000000
7/30/2010	1:06:22 PM	BCl3 MFC set to  0.000000
7/30/2010	1:06:22 PM	PHl3 MFC set to  0.000000
7/30/2010	1:06:22 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:06:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:06:22 PM	Tube furnace set to 0
7/30/2010	1:15:22 PM	Helium valve closed
7/30/2010	1:15:22 PM	H2 valve closed
7/30/2010	1:15:22 PM	BCl3 valve closed
7/30/2010	1:15:22 PM	PH3 valve closed
7/30/2010	1:15:22 PM	SiCl4 pre valve closed
7/30/2010	1:15:22 PM	SiCl4 post valve closed
7/30/2010	1:15:22 PM	Bubbler valve closed
7/30/2010	1:15:22 PM	Main Vac valve opened
7/30/2010	1:15:22 PM	Bypass valve opened
7/30/2010	1:15:22 PM	Helium MFC set to  0.000000
7/30/2010	1:15:22 PM	H2 MFC set to  0.000000
7/30/2010	1:15:22 PM	BCl3 MFC set to  0.000000
7/30/2010	1:15:22 PM	PHl3 MFC set to  0.000000
7/30/2010	1:15:22 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:15:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:15:22 PM	Tube furnace set to 0
7/30/2010	1:16:23 PM	H2 valve closed
7/30/2010	1:16:23 PM	BCl3 valve closed
7/30/2010	1:16:23 PM	PH3 valve closed
7/30/2010	1:16:23 PM	SiCl4 pre valve closed
7/30/2010	1:16:23 PM	SiCl4 post valve closed
7/30/2010	1:16:23 PM	Bubbler valve closed
7/30/2010	1:16:23 PM	Helium valve opened
7/30/2010	1:16:23 PM	Main Vac valve opened
7/30/2010	1:16:23 PM	Bypass valve opened
7/30/2010	1:16:23 PM	Helium MFC set to  100.000000
7/30/2010	1:16:23 PM	H2 MFC set to  0.000000
7/30/2010	1:16:23 PM	BCl3 MFC set to  0.000000
7/30/2010	1:16:23 PM	PHl3 MFC set to  0.000000
7/30/2010	1:16:23 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:16:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:16:23 PM	Tube furnace set to 0
7/30/2010	1:25:23 PM	Helium valve closed
7/30/2010	1:25:23 PM	H2 valve closed
7/30/2010	1:25:23 PM	BCl3 valve closed
7/30/2010	1:25:23 PM	PH3 valve closed
7/30/2010	1:25:23 PM	SiCl4 pre valve closed
7/30/2010	1:25:23 PM	SiCl4 post valve closed
7/30/2010	1:25:23 PM	Bubbler valve closed
7/30/2010	1:25:23 PM	Main Vac valve opened
7/30/2010	1:25:23 PM	Bypass valve opened
7/30/2010	1:25:23 PM	Helium MFC set to  0.000000
7/30/2010	1:25:23 PM	H2 MFC set to  0.000000
7/30/2010	1:25:23 PM	BCl3 MFC set to  0.000000
7/30/2010	1:25:23 PM	PHl3 MFC set to  0.000000
7/30/2010	1:25:23 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:25:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:25:23 PM	Tube furnace set to 0
7/30/2010	1:26:23 PM	H2 valve closed
7/30/2010	1:26:23 PM	BCl3 valve closed
7/30/2010	1:26:23 PM	PH3 valve closed
7/30/2010	1:26:23 PM	SiCl4 pre valve closed
7/30/2010	1:26:23 PM	SiCl4 post valve closed
7/30/2010	1:26:23 PM	Bubbler valve closed
7/30/2010	1:26:23 PM	Helium valve opened
7/30/2010	1:26:23 PM	Main Vac valve opened
7/30/2010	1:26:23 PM	Bypass valve opened
7/30/2010	1:26:23 PM	Helium MFC set to  100.000000
7/30/2010	1:26:23 PM	H2 MFC set to  0.000000
7/30/2010	1:26:23 PM	BCl3 MFC set to  0.000000
7/30/2010	1:26:23 PM	PHl3 MFC set to  0.000000
7/30/2010	1:26:23 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:26:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:26:23 PM	Tube furnace set to 0
7/30/2010	1:35:23 PM	Helium valve closed
7/30/2010	1:35:23 PM	H2 valve closed
7/30/2010	1:35:23 PM	BCl3 valve closed
7/30/2010	1:35:23 PM	PH3 valve closed
7/30/2010	1:35:23 PM	SiCl4 pre valve closed
7/30/2010	1:35:23 PM	SiCl4 post valve closed
7/30/2010	1:35:23 PM	Bubbler valve closed
7/30/2010	1:35:23 PM	Main Vac valve opened
7/30/2010	1:35:23 PM	Bypass valve opened
7/30/2010	1:35:23 PM	Helium MFC set to  0.000000
7/30/2010	1:35:23 PM	H2 MFC set to  0.000000
7/30/2010	1:35:23 PM	BCl3 MFC set to  0.000000
7/30/2010	1:35:23 PM	PHl3 MFC set to  0.000000
7/30/2010	1:35:23 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:35:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:35:23 PM	Tube furnace set to 0
7/30/2010	1:35:24 PM	Run finished at 1:35 PM
7/30/2010	1:35:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	1:44:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	1:44:24 PM	Recipe started at 1:44 PM
7/30/2010	1:44:24 PM	Helium valve closed
7/30/2010	1:44:24 PM	H2 valve closed
7/30/2010	1:44:24 PM	BCl3 valve closed
7/30/2010	1:44:24 PM	PH3 valve closed
7/30/2010	1:44:24 PM	SiCl4 pre valve closed
7/30/2010	1:44:24 PM	SiCl4 post valve closed
7/30/2010	1:44:24 PM	Main Vac valve closed
7/30/2010	1:44:24 PM	Bubbler valve closed
7/30/2010	1:44:24 PM	Bypass valve opened
7/30/2010	1:44:24 PM	Helium MFC set to  0.000000
7/30/2010	1:44:24 PM	H2 MFC set to  0.000000
7/30/2010	1:44:24 PM	BCl3 MFC set to  0.000000
7/30/2010	1:44:24 PM	PHl3 MFC set to  0.000000
7/30/2010	1:44:24 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:44:24 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:44:24 PM	Tube furnace set to 0
7/30/2010	1:44:25 PM	Helium valve closed
7/30/2010	1:44:25 PM	H2 valve closed
7/30/2010	1:44:25 PM	BCl3 valve closed
7/30/2010	1:44:25 PM	PH3 valve closed
7/30/2010	1:44:25 PM	SiCl4 pre valve closed
7/30/2010	1:44:25 PM	SiCl4 post valve closed
7/30/2010	1:44:25 PM	Bubbler valve closed
7/30/2010	1:44:25 PM	Main Vac valve opened
7/30/2010	1:44:25 PM	Bypass valve opened
7/30/2010	1:44:25 PM	Helium MFC set to  0.000000
7/30/2010	1:44:25 PM	H2 MFC set to  0.000000
7/30/2010	1:44:25 PM	BCl3 MFC set to  0.000000
7/30/2010	1:44:25 PM	PHl3 MFC set to  0.000000
7/30/2010	1:44:25 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:44:25 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:44:25 PM	Tube furnace set to 0
7/30/2010	1:45:25 PM	H2 valve closed
7/30/2010	1:45:25 PM	BCl3 valve closed
7/30/2010	1:45:25 PM	PH3 valve closed
7/30/2010	1:45:25 PM	SiCl4 pre valve closed
7/30/2010	1:45:25 PM	SiCl4 post valve closed
7/30/2010	1:45:25 PM	Bubbler valve closed
7/30/2010	1:45:25 PM	Helium valve opened
7/30/2010	1:45:25 PM	Main Vac valve opened
7/30/2010	1:45:25 PM	Bypass valve opened
7/30/2010	1:45:25 PM	Helium MFC set to  100.000000
7/30/2010	1:45:25 PM	H2 MFC set to  0.000000
7/30/2010	1:45:25 PM	BCl3 MFC set to  0.000000
7/30/2010	1:45:25 PM	PHl3 MFC set to  0.000000
7/30/2010	1:45:25 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:45:25 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:45:25 PM	Tube furnace set to 0
7/30/2010	1:54:25 PM	Helium valve closed
7/30/2010	1:54:25 PM	H2 valve closed
7/30/2010	1:54:25 PM	BCl3 valve closed
7/30/2010	1:54:25 PM	PH3 valve closed
7/30/2010	1:54:25 PM	SiCl4 pre valve closed
7/30/2010	1:54:25 PM	SiCl4 post valve closed
7/30/2010	1:54:25 PM	Bubbler valve closed
7/30/2010	1:54:25 PM	Main Vac valve opened
7/30/2010	1:54:25 PM	Bypass valve opened
7/30/2010	1:54:25 PM	Helium MFC set to  0.000000
7/30/2010	1:54:25 PM	H2 MFC set to  0.000000
7/30/2010	1:54:25 PM	BCl3 MFC set to  0.000000
7/30/2010	1:54:25 PM	PHl3 MFC set to  0.000000
7/30/2010	1:54:25 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:54:25 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:54:25 PM	Tube furnace set to 0
7/30/2010	1:55:25 PM	H2 valve closed
7/30/2010	1:55:25 PM	BCl3 valve closed
7/30/2010	1:55:25 PM	PH3 valve closed
7/30/2010	1:55:25 PM	SiCl4 pre valve closed
7/30/2010	1:55:25 PM	SiCl4 post valve closed
7/30/2010	1:55:25 PM	Bubbler valve closed
7/30/2010	1:55:25 PM	Helium valve opened
7/30/2010	1:55:25 PM	Main Vac valve opened
7/30/2010	1:55:25 PM	Bypass valve opened
7/30/2010	1:55:25 PM	Helium MFC set to  100.000000
7/30/2010	1:55:25 PM	H2 MFC set to  0.000000
7/30/2010	1:55:25 PM	BCl3 MFC set to  0.000000
7/30/2010	1:55:25 PM	PHl3 MFC set to  0.000000
7/30/2010	1:55:25 PM	SiCl4 MFC set to  0.000000
7/30/2010	1:55:25 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	1:55:25 PM	Tube furnace set to 0
7/30/2010	2:00:29 PM	Helium valve closed
7/30/2010	2:00:29 PM	H2 valve closed
7/30/2010	2:00:29 PM	BCl3 valve closed
7/30/2010	2:00:29 PM	PH3 valve closed
7/30/2010	2:00:29 PM	SiCl4 pre valve closed
7/30/2010	2:00:29 PM	SiCl4 post valve closed
7/30/2010	2:00:29 PM	Bubbler valve closed
7/30/2010	2:00:29 PM	Main Vac valve opened
7/30/2010	2:00:29 PM	Bypass valve opened
7/30/2010	2:00:29 PM	Helium MFC set to  0.000000
7/30/2010	2:00:29 PM	H2 MFC set to  0.000000
7/30/2010	2:00:29 PM	BCl3 MFC set to  0.000000
7/30/2010	2:00:29 PM	PHl3 MFC set to  0.000000
7/30/2010	2:00:29 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:00:29 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:00:29 PM	Tube furnace set to 0
7/30/2010	2:00:29 PM	H2 valve closed
7/30/2010	2:00:29 PM	BCl3 valve closed
7/30/2010	2:00:29 PM	PH3 valve closed
7/30/2010	2:00:29 PM	SiCl4 pre valve closed
7/30/2010	2:00:29 PM	SiCl4 post valve closed
7/30/2010	2:00:29 PM	Bubbler valve closed
7/30/2010	2:00:29 PM	Helium valve opened
7/30/2010	2:00:29 PM	Main Vac valve opened
7/30/2010	2:00:29 PM	Bypass valve opened
7/30/2010	2:00:29 PM	Helium MFC set to  100.000000
7/30/2010	2:00:29 PM	H2 MFC set to  0.000000
7/30/2010	2:00:29 PM	BCl3 MFC set to  0.000000
7/30/2010	2:00:29 PM	PHl3 MFC set to  0.000000
7/30/2010	2:00:29 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:00:29 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:00:30 PM	Tube furnace set to 0
7/30/2010	2:00:30 PM	Helium valve closed
7/30/2010	2:00:30 PM	H2 valve closed
7/30/2010	2:00:30 PM	BCl3 valve closed
7/30/2010	2:00:30 PM	PH3 valve closed
7/30/2010	2:00:30 PM	SiCl4 pre valve closed
7/30/2010	2:00:30 PM	SiCl4 post valve closed
7/30/2010	2:00:30 PM	Bubbler valve closed
7/30/2010	2:00:30 PM	Main Vac valve opened
7/30/2010	2:00:30 PM	Bypass valve opened
7/30/2010	2:00:30 PM	Helium MFC set to  0.000000
7/30/2010	2:00:30 PM	H2 MFC set to  0.000000
7/30/2010	2:00:30 PM	BCl3 MFC set to  0.000000
7/30/2010	2:00:30 PM	PHl3 MFC set to  0.000000
7/30/2010	2:00:30 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:00:30 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:00:30 PM	Tube furnace set to 0
7/30/2010	2:00:31 PM	Run finished at 2:00 PM
7/30/2010	2:00:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	2:01:18 PM	Recipe started at 2:01 PM
7/30/2010	2:01:18 PM	Helium valve closed
7/30/2010	2:01:18 PM	BCl3 valve closed
7/30/2010	2:01:18 PM	PH3 valve closed
7/30/2010	2:01:18 PM	SiCl4 pre valve closed
7/30/2010	2:01:18 PM	SiCl4 post valve closed
7/30/2010	2:01:18 PM	Main Vac valve closed
7/30/2010	2:01:18 PM	Bypass valve closed
7/30/2010	2:01:18 PM	Bubbler valve closed
7/30/2010	2:01:18 PM	H2 valve opened
7/30/2010	2:01:18 PM	Helium MFC set to  0.000000
7/30/2010	2:01:18 PM	H2 MFC set to  500.000000
7/30/2010	2:01:18 PM	BCl3 MFC set to  0.000000
7/30/2010	2:01:18 PM	PHl3 MFC set to  0.000000
7/30/2010	2:01:18 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:01:18 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:01:18 PM	Tube furnace set to 1000
7/30/2010	2:02:37 PM	Helium valve closed
7/30/2010	2:02:37 PM	BCl3 valve closed
7/30/2010	2:02:37 PM	PH3 valve closed
7/30/2010	2:02:37 PM	SiCl4 pre valve closed
7/30/2010	2:02:37 PM	SiCl4 post valve closed
7/30/2010	2:02:37 PM	Main Vac valve closed
7/30/2010	2:02:37 PM	Bypass valve closed
7/30/2010	2:02:37 PM	H2 valve opened
7/30/2010	2:02:37 PM	Bubbler valve opened
7/30/2010	2:02:37 PM	Helium MFC set to  0.000000
7/30/2010	2:02:37 PM	H2 MFC set to  500.000000
7/30/2010	2:02:37 PM	BCl3 MFC set to  0.000000
7/30/2010	2:02:37 PM	PHl3 MFC set to  0.000000
7/30/2010	2:02:37 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:02:37 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:02:37 PM	Tube furnace set to 1000
7/30/2010	2:22:37 PM	Helium valve closed
7/30/2010	2:22:37 PM	PH3 valve closed
7/30/2010	2:22:37 PM	Main Vac valve closed
7/30/2010	2:22:37 PM	Bypass valve closed
7/30/2010	2:22:37 PM	H2 valve opened
7/30/2010	2:22:37 PM	BCl3 valve opened
7/30/2010	2:22:37 PM	SiCl4 pre valve opened
7/30/2010	2:22:37 PM	SiCl4 post valve opened
7/30/2010	2:22:37 PM	Bubbler valve opened
7/30/2010	2:22:37 PM	Helium MFC set to  0.000000
7/30/2010	2:22:37 PM	H2 MFC set to  500.000000
7/30/2010	2:22:37 PM	BCl3 MFC set to  35.000000
7/30/2010	2:22:37 PM	PHl3 MFC set to  0.000000
7/30/2010	2:22:37 PM	SiCl4 MFC set to  50.000000
7/30/2010	2:22:37 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:22:37 PM	Tube furnace set to 1000
7/30/2010	2:32:37 PM	Helium valve closed
7/30/2010	2:32:37 PM	BCl3 valve closed
7/30/2010	2:32:37 PM	PH3 valve closed
7/30/2010	2:32:37 PM	SiCl4 pre valve closed
7/30/2010	2:32:37 PM	SiCl4 post valve closed
7/30/2010	2:32:37 PM	Main Vac valve closed
7/30/2010	2:32:37 PM	Bypass valve closed
7/30/2010	2:32:37 PM	H2 valve opened
7/30/2010	2:32:37 PM	Bubbler valve opened
7/30/2010	2:32:37 PM	Helium MFC set to  0.000000
7/30/2010	2:32:37 PM	H2 MFC set to  500.000000
7/30/2010	2:32:37 PM	BCl3 MFC set to  0.000000
7/30/2010	2:32:37 PM	PHl3 MFC set to  0.000000
7/30/2010	2:32:37 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:32:37 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:32:38 PM	Tube furnace set to 750
7/30/2010	2:52:38 PM	H2 valve closed
7/30/2010	2:52:38 PM	BCl3 valve closed
7/30/2010	2:52:38 PM	PH3 valve closed
7/30/2010	2:52:38 PM	SiCl4 pre valve closed
7/30/2010	2:52:38 PM	SiCl4 post valve closed
7/30/2010	2:52:38 PM	Main Vac valve closed
7/30/2010	2:52:38 PM	Bypass valve closed
7/30/2010	2:52:38 PM	Helium valve opened
7/30/2010	2:52:38 PM	Bubbler valve opened
7/30/2010	2:52:38 PM	Helium MFC set to  500.000000
7/30/2010	2:52:38 PM	H2 MFC set to  0.000000
7/30/2010	2:52:38 PM	BCl3 MFC set to  0.000000
7/30/2010	2:52:38 PM	PHl3 MFC set to  0.000000
7/30/2010	2:52:38 PM	SiCl4 MFC set to  0.000000
7/30/2010	2:52:38 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	2:52:38 PM	Tube furnace set to 0
7/30/2010	3:00:33 PM	Run aborted at 3:00 PM
7/30/2010	3:00:33 PM	Helium valve closed
7/30/2010	3:00:33 PM	H2 valve closed
7/30/2010	3:00:33 PM	BCl3 valve closed
7/30/2010	3:00:33 PM	PH3 valve closed
7/30/2010	3:00:33 PM	SiCl4 pre valve closed
7/30/2010	3:00:33 PM	SiCl4 post valve closed
7/30/2010	3:00:33 PM	Bypass valve closed
7/30/2010	3:00:33 PM	Main Vac valve closed
7/30/2010	3:00:33 PM	Bubbler valve closed
7/30/2010	3:00:33 PM	Helium MFC set to  0.000000
7/30/2010	3:00:33 PM	H2 MFC set to  0.000000
7/30/2010	3:00:33 PM	BCl3 MFC set to  0.000000
7/30/2010	3:00:33 PM	PHl3 MFC set to  0.000000
7/30/2010	3:00:33 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:00:33 PM	Tube furnace set to 0
7/30/2010	3:00:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	3:00:34 PM	Recipe started at 3:00 PM
7/30/2010	3:00:34 PM	H2 valve closed
7/30/2010	3:00:34 PM	BCl3 valve closed
7/30/2010	3:00:34 PM	PH3 valve closed
7/30/2010	3:00:34 PM	SiCl4 pre valve closed
7/30/2010	3:00:34 PM	SiCl4 post valve closed
7/30/2010	3:00:34 PM	Main Vac valve closed
7/30/2010	3:00:34 PM	Bypass valve closed
7/30/2010	3:00:34 PM	Bubbler valve closed
7/30/2010	3:00:34 PM	Helium valve opened
7/30/2010	3:00:34 PM	Helium MFC set to  500.000000
7/30/2010	3:00:34 PM	H2 MFC set to  0.000000
7/30/2010	3:00:34 PM	BCl3 MFC set to  0.000000
7/30/2010	3:00:34 PM	PHl3 MFC set to  0.000000
7/30/2010	3:00:34 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:00:34 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:00:35 PM	Tube furnace set to 0
7/30/2010	3:00:50 PM	Run aborted at 3:00 PM
7/30/2010	3:00:50 PM	Helium valve closed
7/30/2010	3:00:50 PM	H2 valve closed
7/30/2010	3:00:50 PM	BCl3 valve closed
7/30/2010	3:00:50 PM	PH3 valve closed
7/30/2010	3:00:50 PM	SiCl4 pre valve closed
7/30/2010	3:00:50 PM	SiCl4 post valve closed
7/30/2010	3:00:50 PM	Bypass valve closed
7/30/2010	3:00:50 PM	Main Vac valve closed
7/30/2010	3:00:50 PM	Bubbler valve closed
7/30/2010	3:00:50 PM	Helium MFC set to  0.000000
7/30/2010	3:00:50 PM	H2 MFC set to  0.000000
7/30/2010	3:00:50 PM	BCl3 MFC set to  0.000000
7/30/2010	3:00:50 PM	PHl3 MFC set to  0.000000
7/30/2010	3:00:50 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:00:50 PM	Tube furnace set to 0
7/30/2010	3:00:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	3:11:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	3:11:08 PM	Recipe started at 3:11 PM
7/30/2010	3:11:08 PM	Helium valve closed
7/30/2010	3:11:08 PM	H2 valve closed
7/30/2010	3:11:08 PM	BCl3 valve closed
7/30/2010	3:11:08 PM	PH3 valve closed
7/30/2010	3:11:08 PM	SiCl4 pre valve closed
7/30/2010	3:11:08 PM	SiCl4 post valve closed
7/30/2010	3:11:08 PM	Main Vac valve closed
7/30/2010	3:11:08 PM	Bubbler valve closed
7/30/2010	3:11:08 PM	Bypass valve opened
7/30/2010	3:11:08 PM	Helium MFC set to  0.000000
7/30/2010	3:11:08 PM	H2 MFC set to  0.000000
7/30/2010	3:11:08 PM	BCl3 MFC set to  0.000000
7/30/2010	3:11:08 PM	PHl3 MFC set to  0.000000
7/30/2010	3:11:08 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:11:08 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:11:09 PM	Tube furnace set to 0
7/30/2010	3:11:47 PM	Helium valve closed
7/30/2010	3:11:47 PM	H2 valve closed
7/30/2010	3:11:47 PM	BCl3 valve closed
7/30/2010	3:11:47 PM	PH3 valve closed
7/30/2010	3:11:47 PM	SiCl4 pre valve closed
7/30/2010	3:11:47 PM	SiCl4 post valve closed
7/30/2010	3:11:47 PM	Bubbler valve closed
7/30/2010	3:11:47 PM	Main Vac valve opened
7/30/2010	3:11:47 PM	Bypass valve opened
7/30/2010	3:11:47 PM	Helium MFC set to  0.000000
7/30/2010	3:11:47 PM	H2 MFC set to  0.000000
7/30/2010	3:11:47 PM	BCl3 MFC set to  0.000000
7/30/2010	3:11:47 PM	PHl3 MFC set to  0.000000
7/30/2010	3:11:47 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:11:47 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:11:47 PM	Tube furnace set to 0
7/30/2010	3:11:47 PM	Run finished at 3:11 PM
7/30/2010	3:11:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	3:17:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	3:17:48 PM	Recipe started at 3:17 PM
7/30/2010	3:17:48 PM	Helium valve closed
7/30/2010	3:17:48 PM	H2 valve closed
7/30/2010	3:17:48 PM	BCl3 valve closed
7/30/2010	3:17:48 PM	PH3 valve closed
7/30/2010	3:17:48 PM	SiCl4 pre valve closed
7/30/2010	3:17:48 PM	SiCl4 post valve closed
7/30/2010	3:17:48 PM	Main Vac valve closed
7/30/2010	3:17:48 PM	Bubbler valve closed
7/30/2010	3:17:48 PM	Bypass valve opened
7/30/2010	3:17:48 PM	Helium MFC set to  0.000000
7/30/2010	3:17:48 PM	H2 MFC set to  0.000000
7/30/2010	3:17:48 PM	BCl3 MFC set to  0.000000
7/30/2010	3:17:48 PM	PHl3 MFC set to  0.000000
7/30/2010	3:17:48 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:17:48 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:17:48 PM	Tube furnace set to 0
7/30/2010	3:17:49 PM	Helium valve closed
7/30/2010	3:17:49 PM	H2 valve closed
7/30/2010	3:17:49 PM	BCl3 valve closed
7/30/2010	3:17:49 PM	PH3 valve closed
7/30/2010	3:17:49 PM	SiCl4 pre valve closed
7/30/2010	3:17:49 PM	SiCl4 post valve closed
7/30/2010	3:17:49 PM	Bubbler valve closed
7/30/2010	3:17:49 PM	Main Vac valve opened
7/30/2010	3:17:49 PM	Bypass valve opened
7/30/2010	3:17:49 PM	Helium MFC set to  0.000000
7/30/2010	3:17:49 PM	H2 MFC set to  0.000000
7/30/2010	3:17:49 PM	BCl3 MFC set to  0.000000
7/30/2010	3:17:49 PM	PHl3 MFC set to  0.000000
7/30/2010	3:17:49 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:17:49 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:17:49 PM	Tube furnace set to 0
7/30/2010	3:18:49 PM	H2 valve closed
7/30/2010	3:18:49 PM	BCl3 valve closed
7/30/2010	3:18:49 PM	PH3 valve closed
7/30/2010	3:18:49 PM	SiCl4 pre valve closed
7/30/2010	3:18:49 PM	SiCl4 post valve closed
7/30/2010	3:18:49 PM	Bubbler valve closed
7/30/2010	3:18:49 PM	Helium valve opened
7/30/2010	3:18:49 PM	Main Vac valve opened
7/30/2010	3:18:49 PM	Bypass valve opened
7/30/2010	3:18:49 PM	Helium MFC set to  100.000000
7/30/2010	3:18:49 PM	H2 MFC set to  0.000000
7/30/2010	3:18:49 PM	BCl3 MFC set to  0.000000
7/30/2010	3:18:49 PM	PHl3 MFC set to  0.000000
7/30/2010	3:18:49 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:18:49 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:18:49 PM	Tube furnace set to 0
7/30/2010	3:27:49 PM	Helium valve closed
7/30/2010	3:27:49 PM	H2 valve closed
7/30/2010	3:27:49 PM	BCl3 valve closed
7/30/2010	3:27:49 PM	PH3 valve closed
7/30/2010	3:27:49 PM	SiCl4 pre valve closed
7/30/2010	3:27:49 PM	SiCl4 post valve closed
7/30/2010	3:27:49 PM	Bubbler valve closed
7/30/2010	3:27:49 PM	Main Vac valve opened
7/30/2010	3:27:49 PM	Bypass valve opened
7/30/2010	3:27:49 PM	Helium MFC set to  0.000000
7/30/2010	3:27:49 PM	H2 MFC set to  0.000000
7/30/2010	3:27:49 PM	BCl3 MFC set to  0.000000
7/30/2010	3:27:49 PM	PHl3 MFC set to  0.000000
7/30/2010	3:27:49 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:27:49 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:27:49 PM	Tube furnace set to 0
7/30/2010	3:28:49 PM	H2 valve closed
7/30/2010	3:28:49 PM	BCl3 valve closed
7/30/2010	3:28:49 PM	PH3 valve closed
7/30/2010	3:28:49 PM	SiCl4 pre valve closed
7/30/2010	3:28:49 PM	SiCl4 post valve closed
7/30/2010	3:28:49 PM	Bubbler valve closed
7/30/2010	3:28:49 PM	Helium valve opened
7/30/2010	3:28:49 PM	Main Vac valve opened
7/30/2010	3:28:49 PM	Bypass valve opened
7/30/2010	3:28:49 PM	Helium MFC set to  100.000000
7/30/2010	3:28:49 PM	H2 MFC set to  0.000000
7/30/2010	3:28:49 PM	BCl3 MFC set to  0.000000
7/30/2010	3:28:49 PM	PHl3 MFC set to  0.000000
7/30/2010	3:28:49 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:28:49 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:28:49 PM	Tube furnace set to 0
7/30/2010	3:37:49 PM	Helium valve closed
7/30/2010	3:37:49 PM	H2 valve closed
7/30/2010	3:37:49 PM	BCl3 valve closed
7/30/2010	3:37:49 PM	PH3 valve closed
7/30/2010	3:37:49 PM	SiCl4 pre valve closed
7/30/2010	3:37:49 PM	SiCl4 post valve closed
7/30/2010	3:37:49 PM	Bubbler valve closed
7/30/2010	3:37:49 PM	Main Vac valve opened
7/30/2010	3:37:49 PM	Bypass valve opened
7/30/2010	3:37:49 PM	Helium MFC set to  0.000000
7/30/2010	3:37:49 PM	H2 MFC set to  0.000000
7/30/2010	3:37:49 PM	BCl3 MFC set to  0.000000
7/30/2010	3:37:49 PM	PHl3 MFC set to  0.000000
7/30/2010	3:37:49 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:37:49 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:37:50 PM	Tube furnace set to 0
7/30/2010	3:38:50 PM	H2 valve closed
7/30/2010	3:38:50 PM	BCl3 valve closed
7/30/2010	3:38:50 PM	PH3 valve closed
7/30/2010	3:38:50 PM	SiCl4 pre valve closed
7/30/2010	3:38:50 PM	SiCl4 post valve closed
7/30/2010	3:38:50 PM	Bubbler valve closed
7/30/2010	3:38:50 PM	Helium valve opened
7/30/2010	3:38:50 PM	Main Vac valve opened
7/30/2010	3:38:50 PM	Bypass valve opened
7/30/2010	3:38:50 PM	Helium MFC set to  100.000000
7/30/2010	3:38:50 PM	H2 MFC set to  0.000000
7/30/2010	3:38:50 PM	BCl3 MFC set to  0.000000
7/30/2010	3:38:50 PM	PHl3 MFC set to  0.000000
7/30/2010	3:38:50 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:38:50 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:38:50 PM	Tube furnace set to 0
7/30/2010	3:47:50 PM	Helium valve closed
7/30/2010	3:47:50 PM	H2 valve closed
7/30/2010	3:47:50 PM	BCl3 valve closed
7/30/2010	3:47:50 PM	PH3 valve closed
7/30/2010	3:47:50 PM	SiCl4 pre valve closed
7/30/2010	3:47:50 PM	SiCl4 post valve closed
7/30/2010	3:47:50 PM	Bubbler valve closed
7/30/2010	3:47:50 PM	Main Vac valve opened
7/30/2010	3:47:50 PM	Bypass valve opened
7/30/2010	3:47:50 PM	Helium MFC set to  0.000000
7/30/2010	3:47:50 PM	H2 MFC set to  0.000000
7/30/2010	3:47:50 PM	BCl3 MFC set to  0.000000
7/30/2010	3:47:50 PM	PHl3 MFC set to  0.000000
7/30/2010	3:47:50 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:47:50 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:47:50 PM	Tube furnace set to 0
7/30/2010	3:47:51 PM	Run finished at 3:47 PM
7/30/2010	3:47:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	3:59:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	3:59:44 PM	Recipe started at 3:59 PM
7/30/2010	3:59:44 PM	Helium valve closed
7/30/2010	3:59:44 PM	H2 valve closed
7/30/2010	3:59:44 PM	BCl3 valve closed
7/30/2010	3:59:44 PM	PH3 valve closed
7/30/2010	3:59:44 PM	SiCl4 pre valve closed
7/30/2010	3:59:44 PM	SiCl4 post valve closed
7/30/2010	3:59:44 PM	Main Vac valve closed
7/30/2010	3:59:44 PM	Bubbler valve closed
7/30/2010	3:59:44 PM	Bypass valve opened
7/30/2010	3:59:44 PM	Helium MFC set to  0.000000
7/30/2010	3:59:44 PM	H2 MFC set to  0.000000
7/30/2010	3:59:44 PM	BCl3 MFC set to  0.000000
7/30/2010	3:59:44 PM	PHl3 MFC set to  0.000000
7/30/2010	3:59:44 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:59:44 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:59:44 PM	Tube furnace set to 0
7/30/2010	3:59:44 PM	Helium valve closed
7/30/2010	3:59:44 PM	H2 valve closed
7/30/2010	3:59:44 PM	BCl3 valve closed
7/30/2010	3:59:44 PM	PH3 valve closed
7/30/2010	3:59:44 PM	SiCl4 pre valve closed
7/30/2010	3:59:44 PM	SiCl4 post valve closed
7/30/2010	3:59:44 PM	Bubbler valve closed
7/30/2010	3:59:44 PM	Main Vac valve opened
7/30/2010	3:59:44 PM	Bypass valve opened
7/30/2010	3:59:44 PM	Helium MFC set to  0.000000
7/30/2010	3:59:44 PM	H2 MFC set to  0.000000
7/30/2010	3:59:44 PM	BCl3 MFC set to  0.000000
7/30/2010	3:59:44 PM	PHl3 MFC set to  0.000000
7/30/2010	3:59:44 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:59:44 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:59:44 PM	Tube furnace set to 0
7/30/2010	3:59:51 PM	H2 valve closed
7/30/2010	3:59:51 PM	BCl3 valve closed
7/30/2010	3:59:51 PM	PH3 valve closed
7/30/2010	3:59:51 PM	SiCl4 pre valve closed
7/30/2010	3:59:51 PM	SiCl4 post valve closed
7/30/2010	3:59:51 PM	Bubbler valve closed
7/30/2010	3:59:51 PM	Helium valve opened
7/30/2010	3:59:51 PM	Main Vac valve opened
7/30/2010	3:59:51 PM	Bypass valve opened
7/30/2010	3:59:51 PM	Helium MFC set to  100.000000
7/30/2010	3:59:51 PM	H2 MFC set to  0.000000
7/30/2010	3:59:51 PM	BCl3 MFC set to  0.000000
7/30/2010	3:59:51 PM	PHl3 MFC set to  0.000000
7/30/2010	3:59:51 PM	SiCl4 MFC set to  0.000000
7/30/2010	3:59:51 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	3:59:51 PM	Tube furnace set to 0
7/30/2010	3:59:59 PM	Run aborted at 3:59 PM
7/30/2010	3:59:59 PM	Helium valve closed
7/30/2010	3:59:59 PM	H2 valve closed
7/30/2010	3:59:59 PM	BCl3 valve closed
7/30/2010	3:59:59 PM	PH3 valve closed
7/30/2010	3:59:59 PM	SiCl4 pre valve closed
7/30/2010	3:59:59 PM	SiCl4 post valve closed
7/30/2010	3:59:59 PM	Bypass valve closed
7/30/2010	3:59:59 PM	Main Vac valve closed
7/30/2010	3:59:59 PM	Bubbler valve closed
7/30/2010	3:59:59 PM	Helium MFC set to  0.000000
7/30/2010	3:59:59 PM	H2 MFC set to  0.000000
7/30/2010	3:59:59 PM	BCl3 MFC set to  0.000000
7/30/2010	3:59:59 PM	PHl3 MFC set to  0.000000
7/30/2010	3:59:59 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:00:00 PM	Tube furnace set to 0
7/30/2010	4:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/30/2010	4:00:05 PM	Helium MFC set to  100.000000
7/30/2010	4:00:06 PM	Helium valve opened
7/30/2010	4:00:12 PM	Helium MFC set to  500.000000
7/30/2010	4:00:29 PM	Helium MFC set to  100.000000
7/30/2010	4:00:40 PM	Helium valve closed
7/30/2010	4:00:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	4:00:42 PM	Recipe started at 4:00 PM
7/30/2010	4:00:42 PM	Helium valve closed
7/30/2010	4:00:42 PM	H2 valve closed
7/30/2010	4:00:42 PM	BCl3 valve closed
7/30/2010	4:00:42 PM	PH3 valve closed
7/30/2010	4:00:42 PM	SiCl4 pre valve closed
7/30/2010	4:00:42 PM	SiCl4 post valve closed
7/30/2010	4:00:42 PM	Main Vac valve closed
7/30/2010	4:00:42 PM	Bubbler valve closed
7/30/2010	4:00:42 PM	Bypass valve opened
7/30/2010	4:00:42 PM	Helium MFC set to  0.000000
7/30/2010	4:00:42 PM	H2 MFC set to  0.000000
7/30/2010	4:00:42 PM	BCl3 MFC set to  0.000000
7/30/2010	4:00:42 PM	PHl3 MFC set to  0.000000
7/30/2010	4:00:42 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:00:42 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:00:42 PM	Tube furnace set to 0
7/30/2010	4:00:59 PM	Helium valve closed
7/30/2010	4:00:59 PM	H2 valve closed
7/30/2010	4:00:59 PM	BCl3 valve closed
7/30/2010	4:00:59 PM	PH3 valve closed
7/30/2010	4:00:59 PM	SiCl4 pre valve closed
7/30/2010	4:00:59 PM	SiCl4 post valve closed
7/30/2010	4:00:59 PM	Bubbler valve closed
7/30/2010	4:00:59 PM	Main Vac valve opened
7/30/2010	4:00:59 PM	Bypass valve opened
7/30/2010	4:00:59 PM	Helium MFC set to  0.000000
7/30/2010	4:00:59 PM	H2 MFC set to  0.000000
7/30/2010	4:00:59 PM	BCl3 MFC set to  0.000000
7/30/2010	4:00:59 PM	PHl3 MFC set to  0.000000
7/30/2010	4:00:59 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:00:59 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:01:00 PM	Tube furnace set to 0
7/30/2010	4:01:00 PM	Run finished at 4:01 PM
7/30/2010	4:01:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	4:01:05 PM	Helium MFC set to  100.000000
7/30/2010	4:01:07 PM	Helium valve opened
7/30/2010	4:01:31 PM	Helium MFC set to  500.000000
7/30/2010	4:02:17 PM	Helium MFC set to  100.000000
7/30/2010	4:04:07 PM	Helium valve closed
7/30/2010	4:04:55 PM	Recipe started at 4:04 PM
7/30/2010	4:04:55 PM	Helium valve closed
7/30/2010	4:04:55 PM	BCl3 valve closed
7/30/2010	4:04:55 PM	PH3 valve closed
7/30/2010	4:04:55 PM	SiCl4 pre valve closed
7/30/2010	4:04:55 PM	SiCl4 post valve closed
7/30/2010	4:04:55 PM	Main Vac valve closed
7/30/2010	4:04:55 PM	Bypass valve closed
7/30/2010	4:04:55 PM	Bubbler valve closed
7/30/2010	4:04:55 PM	H2 valve opened
7/30/2010	4:04:55 PM	Helium MFC set to  0.000000
7/30/2010	4:04:55 PM	H2 MFC set to  500.000000
7/30/2010	4:04:55 PM	BCl3 MFC set to  0.000000
7/30/2010	4:04:55 PM	PHl3 MFC set to  0.000000
7/30/2010	4:04:55 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:04:55 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:04:55 PM	Tube furnace set to 1000
7/30/2010	4:06:13 PM	Helium valve closed
7/30/2010	4:06:13 PM	BCl3 valve closed
7/30/2010	4:06:13 PM	PH3 valve closed
7/30/2010	4:06:13 PM	SiCl4 pre valve closed
7/30/2010	4:06:13 PM	SiCl4 post valve closed
7/30/2010	4:06:13 PM	Main Vac valve closed
7/30/2010	4:06:13 PM	Bypass valve closed
7/30/2010	4:06:13 PM	H2 valve opened
7/30/2010	4:06:13 PM	Bubbler valve opened
7/30/2010	4:06:13 PM	Helium MFC set to  0.000000
7/30/2010	4:06:13 PM	H2 MFC set to  500.000000
7/30/2010	4:06:13 PM	BCl3 MFC set to  0.000000
7/30/2010	4:06:13 PM	PHl3 MFC set to  0.000000
7/30/2010	4:06:13 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:06:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:06:13 PM	Tube furnace set to 1000
7/30/2010	4:26:13 PM	Helium valve closed
7/30/2010	4:26:13 PM	PH3 valve closed
7/30/2010	4:26:13 PM	Main Vac valve closed
7/30/2010	4:26:13 PM	Bypass valve closed
7/30/2010	4:26:13 PM	H2 valve opened
7/30/2010	4:26:13 PM	BCl3 valve opened
7/30/2010	4:26:13 PM	SiCl4 pre valve opened
7/30/2010	4:26:13 PM	SiCl4 post valve opened
7/30/2010	4:26:13 PM	Bubbler valve opened
7/30/2010	4:26:13 PM	Helium MFC set to  0.000000
7/30/2010	4:26:13 PM	H2 MFC set to  500.000000
7/30/2010	4:26:13 PM	BCl3 MFC set to  35.000000
7/30/2010	4:26:13 PM	PHl3 MFC set to  0.000000
7/30/2010	4:26:13 PM	SiCl4 MFC set to  50.000000
7/30/2010	4:26:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:26:13 PM	Tube furnace set to 1000
7/30/2010	4:36:13 PM	Helium valve closed
7/30/2010	4:36:13 PM	BCl3 valve closed
7/30/2010	4:36:13 PM	PH3 valve closed
7/30/2010	4:36:13 PM	SiCl4 pre valve closed
7/30/2010	4:36:13 PM	SiCl4 post valve closed
7/30/2010	4:36:13 PM	Main Vac valve closed
7/30/2010	4:36:13 PM	Bypass valve closed
7/30/2010	4:36:13 PM	H2 valve opened
7/30/2010	4:36:13 PM	Bubbler valve opened
7/30/2010	4:36:13 PM	Helium MFC set to  0.000000
7/30/2010	4:36:13 PM	H2 MFC set to  500.000000
7/30/2010	4:36:13 PM	BCl3 MFC set to  0.000000
7/30/2010	4:36:13 PM	PHl3 MFC set to  0.000000
7/30/2010	4:36:13 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:36:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:36:13 PM	Tube furnace set to 750
7/30/2010	4:56:13 PM	H2 valve closed
7/30/2010	4:56:13 PM	BCl3 valve closed
7/30/2010	4:56:13 PM	PH3 valve closed
7/30/2010	4:56:13 PM	SiCl4 pre valve closed
7/30/2010	4:56:13 PM	SiCl4 post valve closed
7/30/2010	4:56:13 PM	Main Vac valve closed
7/30/2010	4:56:13 PM	Bypass valve closed
7/30/2010	4:56:13 PM	Helium valve opened
7/30/2010	4:56:13 PM	Bubbler valve opened
7/30/2010	4:56:13 PM	Helium MFC set to  500.000000
7/30/2010	4:56:13 PM	H2 MFC set to  0.000000
7/30/2010	4:56:13 PM	BCl3 MFC set to  0.000000
7/30/2010	4:56:13 PM	PHl3 MFC set to  0.000000
7/30/2010	4:56:13 PM	SiCl4 MFC set to  0.000000
7/30/2010	4:56:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	4:56:14 PM	Tube furnace set to 0
7/30/2010	5:16:14 PM	Helium valve closed
7/30/2010	5:16:14 PM	H2 valve closed
7/30/2010	5:16:14 PM	BCl3 valve closed
7/30/2010	5:16:14 PM	PH3 valve closed
7/30/2010	5:16:14 PM	SiCl4 pre valve closed
7/30/2010	5:16:14 PM	SiCl4 post valve closed
7/30/2010	5:16:14 PM	Main Vac valve closed
7/30/2010	5:16:14 PM	Bypass valve closed
7/30/2010	5:16:14 PM	Bubbler valve closed
7/30/2010	5:16:14 PM	Helium MFC set to  0.000000
7/30/2010	5:16:14 PM	H2 MFC set to  0.000000
7/30/2010	5:16:14 PM	BCl3 MFC set to  0.000000
7/30/2010	5:16:14 PM	PHl3 MFC set to  0.000000
7/30/2010	5:16:14 PM	SiCl4 MFC set to  0.000000
7/30/2010	5:16:14 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	5:16:14 PM	Tube furnace set to 0
7/30/2010	5:16:14 PM	Run finished at 5:16 PM
7/30/2010	5:27:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	5:27:46 PM	Recipe started at 5:27 PM
7/30/2010	5:27:46 PM	Helium valve closed
7/30/2010	5:27:46 PM	H2 valve closed
7/30/2010	5:27:46 PM	BCl3 valve closed
7/30/2010	5:27:46 PM	PH3 valve closed
7/30/2010	5:27:46 PM	SiCl4 pre valve closed
7/30/2010	5:27:46 PM	SiCl4 post valve closed
7/30/2010	5:27:46 PM	Main Vac valve closed
7/30/2010	5:27:46 PM	Bubbler valve closed
7/30/2010	5:27:46 PM	Bypass valve opened
7/30/2010	5:27:46 PM	Helium MFC set to  0.000000
7/30/2010	5:27:46 PM	H2 MFC set to  0.000000
7/30/2010	5:27:46 PM	BCl3 MFC set to  0.000000
7/30/2010	5:27:46 PM	PHl3 MFC set to  0.000000
7/30/2010	5:27:46 PM	SiCl4 MFC set to  0.000000
7/30/2010	5:27:46 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	5:27:46 PM	Tube furnace set to 0
7/30/2010	5:28:24 PM	Helium valve closed
7/30/2010	5:28:24 PM	H2 valve closed
7/30/2010	5:28:24 PM	BCl3 valve closed
7/30/2010	5:28:24 PM	PH3 valve closed
7/30/2010	5:28:24 PM	SiCl4 pre valve closed
7/30/2010	5:28:24 PM	SiCl4 post valve closed
7/30/2010	5:28:24 PM	Bubbler valve closed
7/30/2010	5:28:24 PM	Main Vac valve opened
7/30/2010	5:28:24 PM	Bypass valve opened
7/30/2010	5:28:24 PM	Helium MFC set to  0.000000
7/30/2010	5:28:24 PM	H2 MFC set to  0.000000
7/30/2010	5:28:24 PM	BCl3 MFC set to  0.000000
7/30/2010	5:28:24 PM	PHl3 MFC set to  0.000000
7/30/2010	5:28:24 PM	SiCl4 MFC set to  0.000000
7/30/2010	5:28:24 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	5:28:24 PM	Tube furnace set to 0
7/30/2010	5:28:24 PM	Run finished at 5:28 PM
7/30/2010	5:28:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	5:58:23 PM	Helium MFC set to  100.000000
7/30/2010	5:58:24 PM	Helium valve opened
7/30/2010	6:11:38 PM	Helium valve closed
7/30/2010	6:12:27 PM	Recipe started at 6:12 PM
7/30/2010	6:12:27 PM	Helium valve closed
7/30/2010	6:12:27 PM	BCl3 valve closed
7/30/2010	6:12:27 PM	PH3 valve closed
7/30/2010	6:12:27 PM	SiCl4 pre valve closed
7/30/2010	6:12:27 PM	SiCl4 post valve closed
7/30/2010	6:12:27 PM	Main Vac valve closed
7/30/2010	6:12:27 PM	Bypass valve closed
7/30/2010	6:12:27 PM	Bubbler valve closed
7/30/2010	6:12:27 PM	H2 valve opened
7/30/2010	6:12:27 PM	Helium MFC set to  0.000000
7/30/2010	6:12:27 PM	H2 MFC set to  500.000000
7/30/2010	6:12:27 PM	BCl3 MFC set to  0.000000
7/30/2010	6:12:27 PM	PHl3 MFC set to  0.000000
7/30/2010	6:12:27 PM	SiCl4 MFC set to  0.000000
7/30/2010	6:12:27 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	6:12:27 PM	Tube furnace set to 1000
7/30/2010	6:13:45 PM	Helium valve closed
7/30/2010	6:13:45 PM	BCl3 valve closed
7/30/2010	6:13:45 PM	PH3 valve closed
7/30/2010	6:13:45 PM	SiCl4 pre valve closed
7/30/2010	6:13:45 PM	SiCl4 post valve closed
7/30/2010	6:13:45 PM	Main Vac valve closed
7/30/2010	6:13:45 PM	Bypass valve closed
7/30/2010	6:13:45 PM	H2 valve opened
7/30/2010	6:13:45 PM	Bubbler valve opened
7/30/2010	6:13:45 PM	Helium MFC set to  0.000000
7/30/2010	6:13:45 PM	H2 MFC set to  500.000000
7/30/2010	6:13:45 PM	BCl3 MFC set to  0.000000
7/30/2010	6:13:45 PM	PHl3 MFC set to  0.000000
7/30/2010	6:13:45 PM	SiCl4 MFC set to  0.000000
7/30/2010	6:13:45 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	6:13:45 PM	Tube furnace set to 1000
7/30/2010	6:33:45 PM	Helium valve closed
7/30/2010	6:33:45 PM	PH3 valve closed
7/30/2010	6:33:45 PM	Main Vac valve closed
7/30/2010	6:33:45 PM	Bypass valve closed
7/30/2010	6:33:45 PM	H2 valve opened
7/30/2010	6:33:45 PM	BCl3 valve opened
7/30/2010	6:33:45 PM	SiCl4 pre valve opened
7/30/2010	6:33:45 PM	SiCl4 post valve opened
7/30/2010	6:33:45 PM	Bubbler valve opened
7/30/2010	6:33:45 PM	Helium MFC set to  0.000000
7/30/2010	6:33:45 PM	H2 MFC set to  500.000000
7/30/2010	6:33:45 PM	BCl3 MFC set to  35.000000
7/30/2010	6:33:45 PM	PHl3 MFC set to  0.000000
7/30/2010	6:33:45 PM	SiCl4 MFC set to  50.000000
7/30/2010	6:33:45 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	6:33:45 PM	Tube furnace set to 1000
7/30/2010	6:43:45 PM	Helium valve closed
7/30/2010	6:43:45 PM	BCl3 valve closed
7/30/2010	6:43:45 PM	PH3 valve closed
7/30/2010	6:43:45 PM	SiCl4 pre valve closed
7/30/2010	6:43:45 PM	SiCl4 post valve closed
7/30/2010	6:43:45 PM	Main Vac valve closed
7/30/2010	6:43:45 PM	Bypass valve closed
7/30/2010	6:43:45 PM	H2 valve opened
7/30/2010	6:43:45 PM	Bubbler valve opened
7/30/2010	6:43:45 PM	Helium MFC set to  0.000000
7/30/2010	6:43:45 PM	H2 MFC set to  500.000000
7/30/2010	6:43:45 PM	BCl3 MFC set to  0.000000
7/30/2010	6:43:45 PM	PHl3 MFC set to  0.000000
7/30/2010	6:43:45 PM	SiCl4 MFC set to  0.000000
7/30/2010	6:43:45 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	6:43:46 PM	Tube furnace set to 750
7/30/2010	7:03:46 PM	H2 valve closed
7/30/2010	7:03:46 PM	BCl3 valve closed
7/30/2010	7:03:46 PM	PH3 valve closed
7/30/2010	7:03:46 PM	SiCl4 pre valve closed
7/30/2010	7:03:46 PM	SiCl4 post valve closed
7/30/2010	7:03:46 PM	Main Vac valve closed
7/30/2010	7:03:46 PM	Bypass valve closed
7/30/2010	7:03:46 PM	Helium valve opened
7/30/2010	7:03:46 PM	Bubbler valve opened
7/30/2010	7:03:46 PM	Helium MFC set to  500.000000
7/30/2010	7:03:46 PM	H2 MFC set to  0.000000
7/30/2010	7:03:46 PM	BCl3 MFC set to  0.000000
7/30/2010	7:03:46 PM	PHl3 MFC set to  0.000000
7/30/2010	7:03:46 PM	SiCl4 MFC set to  0.000000
7/30/2010	7:03:46 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:03:46 PM	Tube furnace set to 0
7/30/2010	7:23:46 PM	Helium valve closed
7/30/2010	7:23:46 PM	H2 valve closed
7/30/2010	7:23:46 PM	BCl3 valve closed
7/30/2010	7:23:46 PM	PH3 valve closed
7/30/2010	7:23:46 PM	SiCl4 pre valve closed
7/30/2010	7:23:46 PM	SiCl4 post valve closed
7/30/2010	7:23:46 PM	Main Vac valve closed
7/30/2010	7:23:46 PM	Bypass valve closed
7/30/2010	7:23:46 PM	Bubbler valve closed
7/30/2010	7:23:46 PM	Helium MFC set to  0.000000
7/30/2010	7:23:46 PM	H2 MFC set to  0.000000
7/30/2010	7:23:46 PM	BCl3 MFC set to  0.000000
7/30/2010	7:23:46 PM	PHl3 MFC set to  0.000000
7/30/2010	7:23:46 PM	SiCl4 MFC set to  0.000000
7/30/2010	7:23:46 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	7:23:46 PM	Tube furnace set to 0
7/30/2010	7:23:46 PM	Run finished at 7:23 PM
7/30/2010	8:02:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	8:02:23 PM	Recipe started at 8:02 PM
7/30/2010	8:02:23 PM	H2 valve closed
7/30/2010	8:02:23 PM	BCl3 valve closed
7/30/2010	8:02:23 PM	PH3 valve closed
7/30/2010	8:02:23 PM	SiCl4 pre valve closed
7/30/2010	8:02:23 PM	SiCl4 post valve closed
7/30/2010	8:02:23 PM	Main Vac valve closed
7/30/2010	8:02:23 PM	Bypass valve closed
7/30/2010	8:02:23 PM	Bubbler valve closed
7/30/2010	8:02:23 PM	Helium valve opened
7/30/2010	8:02:23 PM	Helium MFC set to  500.000000
7/30/2010	8:02:23 PM	H2 MFC set to  0.000000
7/30/2010	8:02:23 PM	BCl3 MFC set to  0.000000
7/30/2010	8:02:23 PM	PHl3 MFC set to  0.000000
7/30/2010	8:02:23 PM	SiCl4 MFC set to  0.000000
7/30/2010	8:02:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:02:24 PM	Tube furnace set to 0
7/30/2010	8:02:31 PM	Helium valve closed
7/30/2010	8:02:31 PM	H2 valve closed
7/30/2010	8:02:31 PM	BCl3 valve closed
7/30/2010	8:02:31 PM	PH3 valve closed
7/30/2010	8:02:31 PM	SiCl4 pre valve closed
7/30/2010	8:02:31 PM	SiCl4 post valve closed
7/30/2010	8:02:31 PM	Main Vac valve closed
7/30/2010	8:02:31 PM	Bypass valve closed
7/30/2010	8:02:31 PM	Bubbler valve closed
7/30/2010	8:02:31 PM	Helium MFC set to  0.000000
7/30/2010	8:02:31 PM	H2 MFC set to  0.000000
7/30/2010	8:02:31 PM	BCl3 MFC set to  0.000000
7/30/2010	8:02:31 PM	PHl3 MFC set to  0.000000
7/30/2010	8:02:31 PM	SiCl4 MFC set to  0.000000
7/30/2010	8:02:31 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:02:31 PM	Tube furnace set to 0
7/30/2010	8:02:31 PM	Run finished at 8:02 PM
7/30/2010	8:02:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2010	8:07:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	8:07:06 PM	Recipe started at 8:07 PM
7/30/2010	8:07:07 PM	Helium valve closed
7/30/2010	8:07:07 PM	H2 valve closed
7/30/2010	8:07:07 PM	BCl3 valve closed
7/30/2010	8:07:07 PM	PH3 valve closed
7/30/2010	8:07:07 PM	SiCl4 pre valve closed
7/30/2010	8:07:07 PM	SiCl4 post valve closed
7/30/2010	8:07:07 PM	Main Vac valve closed
7/30/2010	8:07:07 PM	Bubbler valve closed
7/30/2010	8:07:07 PM	Bypass valve opened
7/30/2010	8:07:07 PM	Helium MFC set to  0.000000
7/30/2010	8:07:07 PM	H2 MFC set to  0.000000
7/30/2010	8:07:07 PM	BCl3 MFC set to  0.000000
7/30/2010	8:07:07 PM	PHl3 MFC set to  0.000000
7/30/2010	8:07:07 PM	SiCl4 MFC set to  0.000000
7/30/2010	8:07:07 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:07:07 PM	Tube furnace set to 0
7/30/2010	8:07:44 PM	Helium valve closed
7/30/2010	8:07:44 PM	H2 valve closed
7/30/2010	8:07:44 PM	BCl3 valve closed
7/30/2010	8:07:44 PM	PH3 valve closed
7/30/2010	8:07:44 PM	SiCl4 pre valve closed
7/30/2010	8:07:44 PM	SiCl4 post valve closed
7/30/2010	8:07:44 PM	Bubbler valve closed
7/30/2010	8:07:44 PM	Main Vac valve opened
7/30/2010	8:07:44 PM	Bypass valve opened
7/30/2010	8:07:44 PM	Helium MFC set to  0.000000
7/30/2010	8:07:44 PM	H2 MFC set to  0.000000
7/30/2010	8:07:44 PM	BCl3 MFC set to  0.000000
7/30/2010	8:07:44 PM	PHl3 MFC set to  0.000000
7/30/2010	8:07:44 PM	SiCl4 MFC set to  0.000000
7/30/2010	8:07:44 PM	Bypass solenoid MFC set to  0.000000
7/30/2010	8:07:44 PM	Tube furnace set to 0
7/30/2010	8:07:45 PM	Run finished at 8:07 PM
7/30/2010	8:07:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2010	8:07:56 PM	Helium MFC set to  100.000000
7/30/2010	8:07:57 PM	Helium valve opened
7/30/2010	8:08:31 PM	Helium MFC set to  100.000000
7/30/2010	8:08:31 PM	Helium valve closed
7/30/2010	8:08:34 PM	Helium MFC set to  0.000000
